Temperature Sensor

Description

Outputs	Components	Recipe
Mask (Temperature Sensor)(PR Backplane)	Chrome Nugget
Mask (Temperature Sensor)(PR Dielectric)	Nickel Nugget
Mask (Temperature Sensor)(PR Encapsulation)	Antimony Nugget
Mask (Temperature Sensor)(PR Semiconductor)	Manganese Nugget
Mask (Temperature Sensor)(PR Traces)	Tungsten Nugget

Step	Outputs	Components
1	Mask (Temperature Sensor)(PR Backplane) Wafer (Temperature Sensor) (1 of 5)	Mask (Temperature Sensor)(PR Backplane) Silicon Wafer Vial (Negative Photoresist) 365 nm UV Bulbs
2	Mask (Temperature Sensor)(PR Semiconductor) Wafer (Temperature Sensor) (2 of 5)	Mask (Temperature Sensor)(PR Semiconductor) Wafer (Temperature Sensor) (1 of 5) Vial (Positive Photoresist) 254 nm UV Bulbs
3	Mask (Temperature Sensor)(PR Dielectric) Wafer (Temperature Sensor) (3 of 5)	Mask (Temperature Sensor)(PR Dielectric) Wafer (Temperature Sensor) (2 of 5) Vial (Negative Photoresist) 365 nm UV Bulbs
4	Mask (Temperature Sensor)(PR Traces) Wafer (Temperature Sensor) (4 of 5)	Mask (Temperature Sensor)(PR Traces) Wafer (Temperature Sensor) (3 of 5) Vial (Positive Photoresist) 254 nm UV Bulbs
5	Mask (Temperature Sensor)(PR Encapsulation) Wafer (Temperature Sensor)	Mask (Temperature Sensor)(PR Encapsulation) Wafer (Temperature Sensor) (4 of 5) Vial (Negative Photoresist) 254 nm UV Bulbs