NAND

Description

The not-and logic gates (NANDs) can be used to create memory modules like volatile memory dual in-line memory modules (DIMMs) and non-volatile memory solid state drives (SSDs).

Recipes

The starting point for the NAND is a P-type Silicon Wafer with a SiO2 layer.

Step 1.0 Get the Mask (NAND 1st well) from the Mask Writer.

Mask Writer

Outputs	Components	Recipe	Do you want to know more?
Mask (NAND 1st well)	Aluminum Nugget		Photomask (Wikipedia) Photomask (Video)

Step 1.1 Apply a positive photoresist vial to the silicon safer (P-type) SiO2 in the Chemical Solution Deposition machine and obtain the silicon wafer (P-type) SiO2 P-photoresist.

Chemical Solution Deposition

Step 1.2 Use the silicon wafer (P-type) SiO2 P-photoresist, Mask (NAND 1st well) and a UV bulb in the Stepper to imprint the pattern and obtain the Silicon Wafer NAND 1.2. For positive photoresist, the UV light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.

Stepper

Step 1.3 Use the silicon wafer NAND 1.2 and positive photoresist developer vial in the Chemical Processor to remove the unexposed photoresist and obtain silicon wafer NAND 1.3.

Chemical Processor

Step 1.4 Use the silicon wafer NAND 1.3 and ammonium fluoride etchant vial in the Chemical Processor to etch the 1st wells and obtain silicon wafer NAND 1.4.

Chemical Processor

Step 1.5 Use the silicon wafer NAND 1.4 and a photoresist stripper SPM vial in the Chemical Processor to remove the exposed photoresist and obtain silicon wafer NAND 1.5.

Chemical Processor

Step 1.6 Use the silicon wafer NAND 1.5 in the wafer washer to clean the wafer of photoresist residues and obtain silicon wafer NAND 1.6.

Wafer Washer

Step 1.7 Use the silicon wafer NAND 1.6 and an oxygen cartridge in the O2 furnace to grow a SiO2 layer in the wafer and obtain silicon wafer NAND 1.7.

O2 Furnace

Step 1.8 Use the silicon wafer NAND 1.7 and a silicon nugget for atomic layer deposition to fill the well with silicon and obtain silicon wafer NAND 1.8.

Atomic Layer Deposition

Step 1.9 Use the silicon wafer NAND 1.8 and a bag of phosphorus in the Ion Beam to seed the 1st well with ions and obtain silicon wafer NAND 1.9.

Ion Implanter

Step 1.10 The implantation process disrupted the silicon crystal structure. To smooth and repair the silicon crystal, take the silicon wafer NAND 1.9 to the annealing furnace with an argon cartridge and obtain silicon wafer NAND 1.10.

Annealing Furnace

Outputs	Components	Recipe	Do you want to know more?
Silicon Wafer NAND 1.10	Cartridge (Argon) Silicon Wafer NAND 1.9	1	Annealing (Wikipedia)

Step 1.11 Use the silicon wafer NAND 1.10 in the chemical mechanical polisher to strip the excess of metal and obtain a silicon wafer NAND 1.11.

Chemical Mechanical Polisher

Step 1.12 Use the silicon wafer NAND 1.11 in the wafer washer to clean the wafer of photoresist residues and obtain silicon wafer NAND 1.12.

Wafer Washer

Step 1.13 Use the silicon wafer NAND 1.12 in the scanning electron microscope to check if the 1st well was correctly created and obtain silicon wafer NAND 1.13.

Scanning Electron Microscope

Outputs	Components	Recipe	Do you want to know more?
Silicon Wafer NAND 1.13	Silicon Wafer NAND 1.12		Scanning Electron Microscope (Wikipedia)

Step 2.0 Get the Mask (NAND Metal) from the mask writer.

Mask Writer

Outputs	Components	Recipe	Do you want to know more?
Mask (NAND Metal)	Aluminum Nugget		Photomask (Wikipedia) Photomask (Video)

Step 2.1 Use the silicon wafer NAND 1.13 and a negative photoresist vial in the chemical solution deposition machine to obtain the silicon wafer NAND 2.1.

Chemical Solution Deposition

Step 2.2 Use the silicon wafer NAND 2.1, Mask (NAND Metal) and a 254 UV bulb in the Stepper to imprint the etching pattern and obtain the silicon wafer NAND 2.2. For positive photoresist, the UV light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.

Stepper

Step 2.3 Use the silicon wafer NAND 2.2 and negative photoresist developer vial in the chemical processor to remove the unexposed photoresist and obtain silicon wafer NAND 2.3.

Chemical Processor

Step 2.4 Use the silicon wafer NAND 2.3 and a copper nugget for atomic layer deposition to create a copper layer in the wafer and obtain silicon wafer NAND 2.4.

Atomic Layer Deposition

Step 2.5 Use the silicon wafer NAND 2.4 and photoresist stripper SPM vial) in the chemical processor to remove the exposed photoresist and obtain silicon wafer NAND 2.5.

Chemical Processor

Step 2.6 Use the silicon wafer NAND 2.5 in the wafer washer to clean the wafer of photoresist residues and obtain the silicon wafer NAND 2.6.

Wafer Washer

Step 2.7 Use the silicon wafer NAND 2.6 in the scanning electron microscope to check it for defects.

Scanning Electron Microscope

Outputs	Components	Recipe	Do you want to know more?
NAND die wafer	Silicon Wafer NAND 2.6		Scanning Electron Microscope (Wikipedia)

Step 2.8 Use the NAND die wafer in the stone cutter to obtain the NAND die.

Stonecutter

Outputs	Components	Recipe	Do you want to know more?
NAND Die	NAND die wafer	32

With the NAND die, enclosure and the interconnection array in the crafting table you can dreate memory chips with 1GB, 2Gb, 4Gb, 8Gb, 16Gb, 32GB, 64Gb.

History

Semiconductor module 1.0

Gallery

Links to learn more

Introduction to chemical processes for micro- and nanofabrication course from Chris Mack at the University of Texas at Austin (Videos)

Semiconductor fabrication 101 online course from Purdue University (MOC)

Semiconductor manufacturing from Duane Boning at MIT (Course materials)

Fundamentals of semiconductor manufacturing and process control from Gary S. May and Costas J. Spanos (Book PDF)

Photolitography (Book PDF)

Handbook of Silicon Wafer Cleaning Technology (Third Edition) (Book PDF)

Silicon Wafer Cleaning (Paper PDF)

Certification

Semiconductor fabrication 101 online course from Purdue University (MOC)

SEMI University

References

Silicon (Wikipedia)

Semiconductor fabrication 101 online course from Purdue University (MOC)

The Amazing, Humble Silicon Wafer Video from Asianometry (Youtube video)