Difference between revisions of "Controller Chip"

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! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
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|  
 
|  
 
* [[Aluminum Nugget|Aluminum Nugget]]
 
* [[Aluminum Nugget|Aluminum Nugget]]
−
| {{Inventory|{{Inventory/Slot|index=5|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
+
| {{Inventory|
 +
{{Inventory/Slot|index=5|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
{{Inventory/Slot|index=1|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
{{Inventory/Slot|index=1|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
{{Inventory/Slot|index=2|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
{{Inventory/Slot|index=2|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
Line 33: Line 35:
 
{{Inventory/Slot|index=26|title=Mask (Ctrl 1st Mask)|image=Itemmask.png|link=Mask (Ctrl 1st Mask)}}
 
{{Inventory/Slot|index=26|title=Mask (Ctrl 1st Mask)|image=Itemmask.png|link=Mask (Ctrl 1st Mask)}}
 
|type=machining-mill|shapeless=false}}
 
|type=machining-mill|shapeless=false}}
 +
|
 +
*[https://en.wikipedia.org/wiki/Photomask Photomask (Wikipedia)]
 +
 +
 +
*[https://www.youtube.com/watch?v=Pt9NEnWmyMo Photomask (Video)]
 
|}
 
|}
 +
  
  
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! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
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* [[Silicon Wafer (N-type) SiO2]]
 
* [[Silicon Wafer (N-type) SiO2]]
 
| {{Inventory|
 
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer (N-type) SiO2|image=Waferitem.png|link=Silicon Wafer (N-type) SiO2}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer (N-type) SiO2|image=Waferitem.png|link=Silicon Wafer (N-type) SiO2}}
−
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 1.1|image=Waferitem red.png|link=Silicon Wafer Ctrl 1.1}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.1|image=Waferitem red.png|link=Silicon Wafer Ctrl 1.1}}
−
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
 
|type=chemical-solution-deposition|shapeless=false}}
 
|type=chemical-solution-deposition|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photoresist Photoresist (Wikipedia)]
 +
* [https://en.wikipedia.org/wiki/Spin_coating Spin Coating (Wikipedia)]
 +
* [https://web.mit.edu/scholvin/www/nt245/Documents/resists.AN.spin_coating_photoresist.pdf Spin Coating of Photoresists (MIT)]
 +
 +
 +
* [https://www.youtube.com/watch?v=vobdNt81fOk Spin Coating (Youtube Video)]
 
|}
 
|}
  
  
−
; Step 1.2 Use the Silicon Wafer Ctrl 1.1, [[Mask (Ctrl 1st well)]] and a [[365 nm UV Bulbs|UV bulb]] in the [[Contact Printer]] to imprint the pattern and obtain the Silicon Wafer Ctrl 1.2.
+
; Step 1.2 Use the Silicon Wafer Ctrl 1.1, [[Mask (Ctrl 1st well)]] and a [[365 nm UV Bulbs|UV bulb]] in the [[Contact Printer]] to imprint the pattern and obtain the [[Silicon Wafer|Silicon Wafer Ctrl 1.2]]. For positive photoresist, the contact printer light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.  
 
===Contact Printer===
 
===Contact Printer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
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! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
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{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
|type=contact-printer|shapeless=false}}
 
|type=contact-printer|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photolithography Photolitography (Wikipedia)]
 +
 +
 +
* [https://www.youtube.com/watch?v=emUoFq5nRZM Quick intro to Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=udXHWVejDj0 Photolitography (Video)]
 
|}
 
|}
  
  
−
; Step 1.3 Use the Silicon Wafer Ctrl 1.2 and Vial (Ammonium Fluoride Etchant) in the [[Chemical Processor]] to etch the 1st wells and obtain Silicon Wafer Ctrl 1.3.
+
; Step 1.3 Use the Silicon Wafer Ctrl 1.2 and Vial (Positive Photoresist Developer) in the [[Chemical Processor]] to remove the unexposed photoresist and obtain [[Silicon Wafer|Silicon Wafer Ctrl 1.3]].
 
===Chemical Processor===
 
===Chemical Processor===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
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! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
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|  
 
|  
 
* [[Silicon Wafer Ctrl 1.2]]
 
* [[Silicon Wafer Ctrl 1.2]]
−
* [[Vial (Ammonium Fluoride Etchant)]]
+
* [[Vial (Positive Photoresist Developer)]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.2}}
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.2}}
−
{{Inventory/Slot|index=1|title=Vial (Ammonium Fluoride Etchant)|image=Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|amount=1}}
+
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist Developer)|image=Vessel_vial.png|link=Vial (Positive Photoresist Developer)|amount=1}}
 
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 1.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.3}}
 
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 1.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.3}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photoresist Photoresist (Wikipedia)]
 +
* [https://www.microchemicals.com/dokumente/application_notes/development_photoresist.pdf Photoresist Developers (Pdf)]
 +
 +
 +
* [https://www.youtube.com/watch?v=emUoFq5nRZM Quick intro to Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=-n0UKFgrLbo Photoresist Developer (Video)]
 
|}
 
|}
  
  
−
; Step 1.4 Use the Silicon Wafer Ctrl 1.3 and Vial (Photoresist Stripper SPM) in the [[Chemical Processor]] to remove the photoresist and obtain Silicon Wafer Ctrl 1.4.
+
; Step 1.4 Use the Silicon Wafer Ctrl 1.3 and Vial (Ammonium Fluoride Etchant) in the [[Chemical Processor]] to etch the 1st wells and obtain [[Silicon Wafer|Silicon Wafer Ctrl 1.4]].
 
===Chemical Processor===
 
===Chemical Processor===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
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! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
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|  
 
|  
 
* [[Silicon Wafer Ctrl 1.3]]
 
* [[Silicon Wafer Ctrl 1.3]]
 +
* [[Vial (Ammonium Fluoride Etchant)]]
 +
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.3}}
 +
{{Inventory/Slot|index=1|title=Vial (Ammonium Fluoride Etchant)|image=Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|amount=1}}
 +
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 1.4|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.4}}
 +
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 +
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 +
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
*[https://en.wikipedia.org/wiki/Etching_(microfabrication) Etching (Wikipedia)]
 +
*[https://www.hitachi-hightech.com/global/en/knowledge/semiconductor/room/manufacturing/etch.html What is a Etch system? (Website)]
 +
 +
 +
*[https://www.youtube.com/watch?v=2O1TyJGXuWY Quick intro to Etching (Video)]
 +
*[https://www.youtube.com/watch?v=po-nlRUQkbI&t=140s Etching (Video)]
 +
|}
 +
 +
 +
; Step 1.5 Use the Silicon Wafer Ctrl 1.4 and Vial (Photoresist Stripper SPM) in the [[Chemical Processor]] to remove the exposed photoresist and obtain [[Silicon Wafer|Silicon Wafer Ctrl 1.5]].
 +
===Chemical Processor===
 +
{| class="wikitable sortable collapsible"
 +
|-
 +
! Outputs
 +
! Components
 +
! Recipe
 +
! Do you want to know more?
 +
|-
 +
|
 +
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.5|32px|alt=Silicon Wafer Ctrl 1.5]] [[Silicon Wafer Ctrl 1.5]]
 +
|
 +
* [[Silicon Wafer Ctrl 1.4]]
 
* [[Vial (Photoresist Stripper SPM)]]
 
* [[Vial (Photoresist Stripper SPM)]]
 
| {{Inventory|
 
| {{Inventory|
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.3}}
+
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.4|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.4}}
 
{{Inventory/Slot|index=1|title=Vial (Photoresist Stripper SPM)|image=Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|amount=1}}
 
{{Inventory/Slot|index=1|title=Vial (Photoresist Stripper SPM)|image=Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|amount=1}}
−
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 1.4|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.4}}
+
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 1.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.5}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
; Step 1.5 Use the Silicon Wafer Ctrl 1.4 in the Wafer Washer to clean the wafer of photoresist residues and obtain Silicon Wafer Ctrl 1.5.
+
; Step 1.6 Use the Silicon Wafer Ctrl 1.5 in the Wafer Washer to clean the wafer of photoresist residues and obtain [[Silicon Wafer|Silicon Wafer Ctrl 1.6]].
 
===Wafer Washer===
 
===Wafer Washer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
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! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.5|32px|alt=Silicon Wafer Ctrl 1.5|[[Silicon Wafer Ctrl 1.5|Silicon Wafer Ctrl 1.5]]]] [[Silicon Wafer Ctrl 1.5|Silicon Wafer Ctrl 1.5]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.6|32px|alt=Silicon Wafer Ctrl 1.6]] [[Silicon Wafer Ctrl 1.6|Silicon Wafer Ctrl 1.6]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 1.4]]
+
* [[Silicon Wafer Ctrl 1.5]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=1|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 1.4|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.4}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 1.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.5}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 1.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.5}}
+
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 1.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.6}}
 
|type=wafer-washer|shapeless=false}}
 
|type=wafer-washer|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
; Step 1.6 Use the Silicon Wafer Ctrl 1.5, a bag of boron and Mask (Ctrl 1st well) in the Ion Bean to seed the 1st well with ions and obtain Silicon Wafer Ctrl 1.6.
+
; Step 1.7 Use the Silicon Wafer Ctrl 1.6, a bag of boron and Mask (Ctrl 1st well) in the Ion Beam to seed the 1st well with ions and obtain [[Silicon Wafer|Silicon Wafer Ctrl 1.7]].
 
===Ion Implanter===
 
===Ion Implanter===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
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! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.6|32px|alt=Silicon Wafer Ctrl 1.6|[[Silicon Wafer Ctrl 1.6|Silicon Wafer Ctrl 1.6]]]] [[Silicon Wafer Ctrl 1.6|Silicon Wafer Ctrl 1.6]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.7|32px|alt=Silicon Wafer Ctrl 1.7]] [[Silicon Wafer Ctrl 1.7|Silicon Wafer Ctrl 1.7]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 1.5]]
+
* [[Silicon Wafer Ctrl 1.6]]
 
* [[Bag (Boron)]]
 
* [[Bag (Boron)]]
 
* [[Mask (Ctrl 1st well)]]
 
* [[Mask (Ctrl 1st well)]]
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{{Inventory/Slot|index=1|title=Bag (Boron)|image=Vessel_bag.png|link=Bag (Boron)|amount=1}}
 
{{Inventory/Slot|index=1|title=Bag (Boron)|image=Vessel_bag.png|link=Bag (Boron)|amount=1}}
 
{{Inventory/Slot|index=2|title=mask1|image=Itemmask.png|link=mask1}}
 
{{Inventory/Slot|index=2|title=mask1|image=Itemmask.png|link=mask1}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.5}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.6}}
−
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 1.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.6}}
+
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 1.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.7}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
|type=ion-implanter|shapeless=false}}
 
|type=ion-implanter|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 1.7 Use the Silicon Wafer Ctrl 1.6 and an Oxygen Cartridge in the O2 furnace to grow a SiO2 layer in the wafer and obtain Wafer Ctrl 1.7.
+
;Step 1.8 Use the Silicon Wafer Ctrl 1.7 and an Oxygen Cartridge in the O2 furnace to grow a SiO2 layer in the wafer and obtain [[Silicon Wafer|Silicon Wafer Ctrl 1.8]].
 
===O2 Furnace===
 
===O2 Furnace===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
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! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.7|32px|alt=Silicon Wafer Ctrl 1.7|[[Silicon Wafer Ctrl 1.7|Silicon Wafer Ctrl 1.7]]]] [[Silicon Wafer Ctrl 1.7|Silicon Wafer Ctrl 1.7]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.8|32px|alt=Silicon Wafer Ctrl 1.8]] [[Silicon Wafer Ctrl 1.8|Silicon Wafer Ctrl 1.8]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 1.6]]
+
* [[Silicon Wafer Ctrl 1.7]]
 
* [[Cartridge (Oxygen)]]
 
* [[Cartridge (Oxygen)]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Cartridge (Oxygen)|image=Vessel_cartridge.png|link=Cartridge (Oxygen)|amount=1}}
 
{{Inventory/Slot|index=1|title=Cartridge (Oxygen)|image=Vessel_cartridge.png|link=Cartridge (Oxygen)|amount=1}}
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.6}}
+
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.7}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.7}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.8|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.8}}
 
|type=o2_furnace|shapeless=false}}
 
|type=o2_furnace|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 1.8 Use the Silicon Wafer Ctrl 1.7 in the scanning electron microscope to check if the 1st well was correctly created and obtain Wafer Ctrl 1.8.
+
;Step 1.9 Use the Silicon Wafer Ctrl 1.8 in the scanning electron microscope to check if the 1st well was correctly created and obtain [[Silicon Wafer|Silicon Wafer Ctrl 1.9]].
 
===Scanning Electron Microscope===
 
===Scanning Electron Microscope===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
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! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.8|32px|alt=Silicon Wafer Ctrl 1.8|[[Silicon Wafer Ctrl 1.8|Silicon Wafer Ctrl 1.8]]]] [[Silicon Wafer Ctrl 1.8|Silicon Wafer Ctrl 1.8]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.9|32px|alt=Silicon Wafer Ctrl 1.9]] [[Silicon Wafer Ctrl 1.9|Silicon Wafer Ctrl 1.9]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 1.7]]
+
* [[Silicon Wafer Ctrl 1.8]]
 
| {{Inventory|
 
| {{Inventory|
−
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
+
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.7}}
+
{{Inventory/Slot|index=1|title=Silicon Wafer Ctrl 1.8|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.8}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.8|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.8}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 1.9|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.9}}
−
|type=scanning_electron_microscope|shapeless=false}}
+
|type=scanning-electron-microscope|shapeless=false}}
 +
|
 
|}
 
|}
  
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−
 
+
;Step 2.0 Get the Mask (Ctrl 2nd well) from the [[Mask Writer]].
−
;Step 2.0 Get the Mask (Ctrl 2nd well) from the [[Mask Writer]]..
 
 
===Mask Writer===
 
===Mask Writer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
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! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
Line 257: Line 329:
 
{{Inventory/Slot|index=25|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=25|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=26|title=Mask (Ctrl 2nd well)|image=Itemmask.png|link=Mask (Ctrl 2nd well)}}|type=machining-mill|shapeless=false}}
 
{{Inventory/Slot|index=26|title=Mask (Ctrl 2nd well)|image=Itemmask.png|link=Mask (Ctrl 2nd well)}}|type=machining-mill|shapeless=false}}
 +
|
 +
*[https://en.wikipedia.org/wiki/Photomask Photomask (Wikipedia)]
 +
 +
 +
*[https://www.youtube.com/watch?v=Pt9NEnWmyMo Photomask (Video)]
 
|}
 
|}
  
  
−
;Step 2.1 Use the Silicon Wafer Ctrl 1.8 and a Vial (Positive Photoresist) in the [[Chemical Solution Deposition]] machine to obtain the Silicon Wafer Ctrl 2.1.
+
;Step 2.1 Use the Silicon Wafer Ctrl 1.8 and a Vial (Positive Photoresist) in the [[Chemical Solution Deposition]] machine to obtain the [[Silicon Wafer|Silicon Wafer Ctrl 2.1]].
  
 
===Chemical Solution Deposition===
 
===Chemical Solution Deposition===
Line 268: Line 345:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.2|32px|alt=Silicon Wafer Ctrl 2.2]|[[Silicon Wafer Ctrl 2.2|Silicon Wafer Ctrl 2.2]]]] [[Silicon Wafer Ctrl 2.2|Silicon Wafer Ctrl 2.2]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.2|32px|alt=Silicon Wafer Ctrl 2.2]]] [[Silicon Wafer Ctrl 2.2|Silicon Wafer Ctrl 2.2]]
 
|  
 
|  
 
* [[Vial (Positive Photoresist)]]
 
* [[Vial (Positive Photoresist)]]
 
* [[Silicon Wafer Ctrl 2.1]]
 
* [[Silicon Wafer Ctrl 2.1]]
 
| {{Inventory|
 
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.1|image=Waferitem.png|link=Silicon Wafer Ctrl 2.1}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 2.1|image=Waferitem.png|link=Silicon Wafer Ctrl 2.1}}
−
{{Inventory/Slot|index=5|title=Silicon Wafer Ctrl 2.2|image=Waferitem red.png|link=Silicon Wafer Ctrl 2.2}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.2|image=Waferitem red.png|link=Silicon Wafer Ctrl 2.2}}
−
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
 
|type=chemical-solution-deposition|shapeless=false}}
 
|type=chemical-solution-deposition|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photoresist Photoresist (Wikipedia)]
 +
* [https://en.wikipedia.org/wiki/Spin_coating Spin Coating (Wikipedia)]
 +
* [https://web.mit.edu/scholvin/www/nt245/Documents/resists.AN.spin_coating_photoresist.pdf Spin Coating of Photoresists (MIT)]
 
|}
 
|}
  
  
−
;Step 2.2 Use the Silicon Wafer Ctrl 2.1, Mask (Ctrl 2nd well) and a UV bulb in the [[Contact Printer]] to imprint the etching pattern and obtain the Silicon Wafer Ctrl 2.3.
+
;Step 2.2 Use the Silicon Wafer Ctrl 2.1, Mask (Ctrl 2nd well) and a UV bulb in the [[Contact Printer]] to imprint the etching pattern and obtain the [[Silicon Wafer|Silicon Wafer Ctrl 2.3]]. For positive photoresist, the contact printer light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.  
  
 
===Contact Printer===
 
===Contact Printer===
Line 291: Line 373:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.3|32px|alt=Silicon Wafer Ctrl 2.3]|[[Silicon Wafer Ctrl 2.3|Silicon Wafer Ctrl 2.3]]]] [[Silicon Wafer Ctrl 2.3|Silicon Wafer Ctrl 2.3]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.3|32px|alt=Silicon Wafer Ctrl 2.3]]] [[Silicon Wafer Ctrl 2.3|Silicon Wafer Ctrl 2.3]]
 
|  
 
|  
 
* [[365 nm UV Bulbs]]
 
* [[365 nm UV Bulbs]]
Line 306: Line 389:
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
|type=contact-printer|shapeless=false}}
 
|type=contact-printer|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photolithography Photolitography (Wikipedia)]
 +
 +
 +
* [https://www.youtube.com/watch?v=emUoFq5nRZM Quick intro to Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=udXHWVejDj0 Photolitography (Video)]
 
|}
 
|}
  
  
−
;Step 2.3 Use the Silicon Wafer Ctrl 2.2 and Vial (Ammonium Fluoride Etchant) in the [[Chemical Processor]] to etch the 2nd wells and obtain Silicon Wafer Ctrl 2.3.
+
;Step 2.3 Use the Silicon Wafer Ctrl 2.2 and Vial (Positive Photoresist Developer) in the [[Chemical Processor]] to remove the unexposed photoresist and obtain [[Silicon Wafer|Silicon Wafer Ctrl 2.3]].
 
===Chemical Processor===
 
===Chemical Processor===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 316: Line 405:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.3|32px|alt=Silicon Wafer Ctrl 2.3|[[Silicon Wafer Ctrl 2.3|Silicon Wafer Ctrl 2.3]]]] [[Silicon Wafer Ctrl 2.3|Silicon Wafer Ctrl 2.3]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.3|32px|alt=Silicon Wafer Ctrl 2.3]] [[Silicon Wafer Ctrl 2.3|Silicon Wafer Ctrl 2.3]]
 
|  
 
|  
 
* [[Silicon Wafer Ctrl 2.2]]
 
* [[Silicon Wafer Ctrl 2.2]]
−
* [[Vial (Ammonium Fluoride Etchant)]]
+
* [[Vial (Positive Photoresist Developer)]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.2}}
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.2}}
−
{{Inventory/Slot|index=1|title=Vial (Ammonium Fluoride Etchant)|image=Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|amount=1}}
+
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist Developer)|image=Vessel_vial.png|link=Vial (Positive Photoresist Developer)|amount=1}}
 
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 2.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.3}}
 
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 2.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.3}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photoresist Photoresist (Wikipedia)]
 +
* [https://www.microchemicals.com/dokumente/application_notes/development_photoresist.pdf Photoresist Developers (Pdf)]
 +
 +
 +
* [https://www.youtube.com/watch?v=emUoFq5nRZM Quick intro to Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=-n0UKFgrLbo Photoresist Developer (Video)]
 
|}
 
|}
  
  
−
;Step 2.4 Use the Silicon Wafer Ctrl 2.3 and Vial (Photoresist Stripper SPM) in the [[Chemical Processor]] to remove the photoresist and obtain Silicon Wafer Ctrl 2.4.
+
;Step 2.4 Use the Silicon Wafer Ctrl 2.3 and Vial (Ammonium Fluoride Etchant) in the [[Chemical Processor]] to etch the 2nd wells and obtain [[Silicon Wafer|Silicon Wafer Ctrl 2.4]].
 
===Chemical Processor===
 
===Chemical Processor===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 339: Line 436:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.4|32px|alt=Silicon Wafer Ctrl 2.4|[[Silicon Wafer Ctrl 2.4|Silicon Wafer Ctrl 2.4]]]] [[Silicon Wafer Ctrl 2.4|Silicon Wafer Ctrl 2.4]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.4|32px|alt=Silicon Wafer Ctrl 2.4]] [[Silicon Wafer Ctrl 2.4|Silicon Wafer Ctrl 2.4]]
 
|  
 
|  
 
* [[Silicon Wafer Ctrl 2.3]]
 
* [[Silicon Wafer Ctrl 2.3]]
 +
* [[Vial (Ammonium Fluoride Etchant)]]
 +
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.3}}
 +
{{Inventory/Slot|index=1|title=Vial (Ammonium Fluoride Etchant)|image=Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|amount=1}}
 +
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 2.4|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.4}}
 +
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 +
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 +
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
*[https://en.wikipedia.org/wiki/Etching_(microfabrication) Etching (Wikipedia)]
 +
*[https://www.hitachi-hightech.com/global/en/knowledge/semiconductor/room/manufacturing/etch.html What is a Etch system? (Website)]
 +
 +
 +
*[https://www.youtube.com/watch?v=2O1TyJGXuWY Quick intro to Etching (Video)]
 +
*[https://www.youtube.com/watch?v=po-nlRUQkbI&t=140s Etching (Video)]
 +
|}
 +
 +
 +
;Step 2.5 Use the Silicon Wafer Ctrl 2.4 and Vial (Photoresist Stripper SPM) in the [[Chemical Processor]] to remove the exposed photoresist and obtain [[Silicon Wafer|Silicon Wafer Ctrl 2.5]].
 +
===Chemical Processor===
 +
{| class="wikitable sortable collapsible"
 +
|-
 +
! Outputs
 +
! Components
 +
! Recipe
 +
! Do you want to know more?
 +
|-
 +
|
 +
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.5|32px|alt=Silicon Wafer Ctrl 2.5]] [[Silicon Wafer Ctrl 2.5|Silicon Wafer Ctrl 2.5]]
 +
|
 +
* [[Silicon Wafer Ctrl 2.4]]
 
* [[Vial (Photoresist Stripper SPM)]]
 
* [[Vial (Photoresist Stripper SPM)]]
 
| {{Inventory|
 
| {{Inventory|
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.3}}
+
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.4|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.4}}
 
{{Inventory/Slot|index=1|title=Vial (Photoresist Stripper SPM)|image=Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|amount=1}}
 
{{Inventory/Slot|index=1|title=Vial (Photoresist Stripper SPM)|image=Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|amount=1}}
−
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 2.4|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.4}}
+
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 2.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.5}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 2.5 Use the Silicon Wafer Ctrl 2.4 in the Wafer Washer to clean the wafer of photoresist residues and obtain Silicon Wafer Ctrl 2.5.
+
;Step 2.6 Use the Silicon Wafer Ctrl 2.5 in the Wafer Washer to clean the wafer of photoresist residues and obtain [[Silicon Wafer|Silicon Wafer Ctrl 2.6]].
 
===Wafer Washer===
 
===Wafer Washer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 362: Line 492:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.5|32px|alt=Silicon Wafer Ctrl 2.5|[[Silicon Wafer Ctrl 2.5|Silicon Wafer Ctrl 2.5]]]] [[Silicon Wafer Ctrl 2.5|Silicon Wafer Ctrl 2.5]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.6|32px|alt=Silicon Wafer Ctrl 2.6]] [[Silicon Wafer Ctrl 2.6|Silicon Wafer Ctrl 2.6]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 2.4]]
+
* [[Silicon Wafer Ctrl 2.5]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=1|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 2.4|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.4}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 2.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.5}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 2.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.5}}
+
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 2.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.6}}
 
|type=wafer-washer|shapeless=false}}
 
|type=wafer-washer|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 2.6 Use the Silicon Wafer Ctrl 2.5, a bag of phosphorus and Mask (Ctrl 2nd well) in the Ion Bean to seed the 2nd well with ions and obtain Silicon Wafer Ctrl 2.6.
+
;Step 2.7 Use the Silicon Wafer Ctrl 2.6, a bag of phosphorus and Mask (Ctrl 2nd well) in the Ion Bean to seed the 2nd well with ions and obtain [[Silicon Wafer|Silicon Wafer Ctrl 2.7]].
 
===Ion Implanter===
 
===Ion Implanter===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 384: Line 516:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.6|32px|alt=Silicon Wafer Ctrl 2.6|[[Silicon Wafer Ctrl 2.6|Silicon Wafer Ctrl 2.6]]]] [[Silicon Wafer Ctrl 2.6|Silicon Wafer Ctrl 2.6]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.7|32px|alt=Silicon Wafer Ctrl 2.7]] [[Silicon Wafer Ctrl 2.7|Silicon Wafer Ctrl 2.7]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 2.5]]
+
* [[Silicon Wafer Ctrl 2.6]]
 
* [[Bag (Phosphorus)]]
 
* [[Bag (Phosphorus)]]
 
* [[Mask (Ctrl 2nd well)]]
 
* [[Mask (Ctrl 2nd well)]]
Line 395: Line 528:
 
{{Inventory/Slot|index=1|title=Bag (Phosphorus)|image=Vessel_bag.png|link=Bag (Phosphorus)|amount=1}}
 
{{Inventory/Slot|index=1|title=Bag (Phosphorus)|image=Vessel_bag.png|link=Bag (Phosphorus)|amount=1}}
 
{{Inventory/Slot|index=2|title=mask1|image=Itemmask.png|link=mask1}}
 
{{Inventory/Slot|index=2|title=mask1|image=Itemmask.png|link=mask1}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.5}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.6}}
−
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 2.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.6}}
+
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 2.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.7}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
|type=ion-implanter|shapeless=false}}
 
|type=ion-implanter|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 2.7 Use the Silicon Wafer Ctrl 2.6 and an Oxygen Cartridge in the O2 furnace to grow a SiO2 layer in the wafer and obtain Wafer Ctrl 2.7.
+
;Step 2.8 Use the Silicon Wafer Ctrl 2.7 and an Oxygen Cartridge in the O2 furnace to grow a SiO2 layer in the wafer and obtain [[Silicon Wafer|Silicon Wafer Ctrl 2.8]].
 
===O2 Furnace===
 
===O2 Furnace===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 409: Line 543:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.7|32px|alt=Silicon Wafer Ctrl 2.7|[[Silicon Wafer Ctrl 2.7|Silicon Wafer Ctrl 2.7]]]] [[Silicon Wafer Ctrl 2.7|Silicon Wafer Ctrl 2.7]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.8|32px|alt=Silicon Wafer Ctrl 2.8]] [[Silicon Wafer Ctrl 2.8]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 2.6]]
+
* [[Silicon Wafer Ctrl 2.7]]
 
* [[Cartridge (Oxygen)]]
 
* [[Cartridge (Oxygen)]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Cartridge (Oxygen)|image=Vessel_cartridge.png|link=Cartridge (Oxygen)|amount=1}}
 
{{Inventory/Slot|index=1|title=Cartridge (Oxygen)|image=Vessel_cartridge.png|link=Cartridge (Oxygen)|amount=1}}
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.6}}
+
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.7}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.7}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.8|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.8}}
 
|type=o2_furnace|shapeless=false}}
 
|type=o2_furnace|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 2.8 Use the Silicon Wafer Ctrl 2.7 in the scanning electron microscope to check if the 2st well was correctly created and obtain Wafer Ctrl 2.8.
+
;Step 2.9 Use the Silicon Wafer Ctrl 2.8 in the scanning electron microscope to check if the 2st well was correctly created and obtain [[Silicon Wafer|Silicon Wafer Ctrl 2.9]].
 
===Scanning Electron Microscope===
 
===Scanning Electron Microscope===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 431: Line 567:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.8|32px|alt=Silicon Wafer Ctrl 2.8|[[Silicon Wafer Ctrl 2.8|Silicon Wafer Ctrl 2.8]]]] [[Silicon Wafer Ctrl 2.8|Silicon Wafer Ctrl 2.8]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.9|32px|alt=Silicon Wafer Ctrl 2.9]] [[Silicon Wafer Ctrl 2.9]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 2.7]]
+
* [[Silicon Wafer Ctrl 2.8]]
 
| {{Inventory|
 
| {{Inventory|
−
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
+
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.7}}
+
{{Inventory/Slot|index=1|title=Silicon Wafer Ctrl 2.8|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.8}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.8|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.8}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 2.9|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.9}}
−
|type=scanning_electron_microscope|shapeless=false}}
+
|type=scanning-electron-microscope|shapeless=false}}
 +
|
 
|}
 
|}
  
Line 449: Line 587:
  
  
−
;Step 3.0 Get the Mask (Ctrl Metal) from the [[Mask Writer]]..
+
;Step 3.0 Get the Mask (Ctrl Metal) from the [[Mask Writer]].
 
===Mask Writer===
 
===Mask Writer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 456: Line 594:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:Itemmask.png|link=Mask (Ctrl Metal)|32px|alt=Mask (Ctrl Metal)|[[Mask (Ctrl Metal)|Mask (Ctrl Metal)]]]] [[Mask (Ctrl Metal)|Mask (Ctrl Metal)]]
+
* [[Image:Itemmask.png|link=Mask (Ctrl Metal)|32px|alt=Mask (Ctrl Metal)]] [[Mask (Ctrl Metal)|Mask (Ctrl Metal)]]
 
|  
 
|  
 
* [[Aluminum Nugget|Aluminum Nugget]]
 
* [[Aluminum Nugget|Aluminum Nugget]]
Line 482: Line 621:
 
{{Inventory/Slot|index=25|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=25|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=26|title=Mask (Ctrl Metal)|image=Itemmask.png|link=Mask (Ctrl Metal)}}|type=machining-mill|shapeless=false}}
 
{{Inventory/Slot|index=26|title=Mask (Ctrl Metal)|image=Itemmask.png|link=Mask (Ctrl Metal)}}|type=machining-mill|shapeless=false}}
 +
|
 +
*[https://en.wikipedia.org/wiki/Photomask Photomask (Wikipedia)]
 +
 +
 +
*[https://www.youtube.com/watch?v=Pt9NEnWmyMo Photomask (Video)]
 
|}
 
|}
  
  
−
;Step 3.1 Use the Silicon Wafer Ctrl 2.8, Mask (Ctrl Metal) and a Vial (Positive Photoresist) in the [[Chemical Solution Deposition]] machine to obtain the Silicon Wafer Ctrl 3.1.
+
;Step 3.1 Use the Silicon Wafer Ctrl 2.8, Mask (Ctrl Metal) and a Vial (Positive Photoresist) in the [[Chemical Solution Deposition]] machine to obtain the [[Silicon Wafer|Silicon Wafer Ctrl 3.1]].
 
===Chemical Solution Deposition===
 
===Chemical Solution Deposition===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 492: Line 636:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.1|32px|alt=Silicon Wafer Ctrl 3.1]|[[Silicon Wafer Ctrl 3.1|Silicon Wafer Ctrl 3.1]]]] [[Silicon Wafer Ctrl 3.1|Silicon Wafer Ctrl 3.1]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.1]]] [[Silicon Wafer|Silicon Wafer Ctrl 3.1]]
 
|  
 
|  
 
* [[Vial (Positive Photoresist)]]
 
* [[Vial (Positive Photoresist)]]
 
* [[Silicon Wafer Ctrl 2.8]]
 
* [[Silicon Wafer Ctrl 2.8]]
 
| {{Inventory|
 
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.8|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.8}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 2.8|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.8}}
−
{{Inventory/Slot|index=5|title=Silicon Wafer Ctrl 3.1|image=Waferitem red.png|link=Silicon Wafer Ctrl 3.1}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 3.1|image=Waferitem red.png|link=Silicon Wafer Ctrl 3.1}}
−
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
 
|type=chemical-solution-deposition|shapeless=false}}
 
|type=chemical-solution-deposition|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photoresist Photoresist (Wikipedia)]
 +
* [https://en.wikipedia.org/wiki/Spin_coating Spin Coating (Wikipedia)]
 +
* [https://web.mit.edu/scholvin/www/nt245/Documents/resists.AN.spin_coating_photoresist.pdf Spin Coating of Photoresists (MIT)]
 
|}
 
|}
  
  
−
;Step 3.2 Use the Silicon Wafer Ctrl 3.1, Mask (Ctrl Metal), Vial (Positive Photoresist) and a UV bulb in the [[Contact Printer]] to imprint the etching pattern and obtain the Silicon Wafer Ctrl 3.2.
+
;Step 3.2 Use the Silicon Wafer Ctrl 3.1, Mask (Ctrl Metal), Vial (Positive Photoresist) and a UV bulb in the [[Contact Printer]] to imprint the etching pattern and obtain the [[Silicon Wafer|Silicon Wafer Ctrl 3.2]]. For positive photoresist, the contact printer light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.  
 
===Contact Printer===
 
===Contact Printer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 514: Line 663:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.2|32px|alt=Silicon Wafer Ctrl 3.2]|[[Silicon Wafer Ctrl 3.2|Silicon Wafer Ctrl 3.2]]]] [[Silicon Wafer Ctrl 3.2|Silicon Wafer Ctrl 3.2]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.2|32px|alt=Silicon Wafer Ctrl 3.2]]] [[Silicon Wafer Ctrl 3.2]]
 
|  
 
|  
 
* [[365 nm UV Bulbs]]
 
* [[365 nm UV Bulbs]]
Line 528: Line 678:
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
|type=contact-printer|shapeless=false}}
 
|type=contact-printer|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photolithography Photolitography (Wikipedia)]
 +
 +
 +
* [https://www.youtube.com/watch?v=emUoFq5nRZM Quick intro to Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=udXHWVejDj0 Photolitography (Video)]
 
|}
 
|}
  
  
−
;Step 3.3 Use the Silicon Wafer Ctrl 3.2 and Vial (Ammonium Fluoride Etchant) in the [[Chemical Processor]] to etch the metal contacts and obtain Silicon Wafer Ctrl 3.3.
+
;Step 3.3 Use the Silicon Wafer Ctrl 3.2 and Vial (Positive Photoresist Developer) in the [[Chemical Processor]] to remove the unexposed photoresist and obtain [[Silicon Wafer|Silicon Wafer Ctrl 3.3]].
 
===Chemical Processor===
 
===Chemical Processor===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 538: Line 694:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.3|32px|alt=Silicon Wafer Ctrl 3.3|[[Silicon Wafer Ctrl 3.3|Silicon Wafer Ctrl 3.3]]]] [[Silicon Wafer Ctrl 3.3|Silicon Wafer Ctrl 3.3]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.3|32px|alt=Silicon Wafer Ctrl 3.3]] [[Silicon Wafer Ctrl 3.3]]
 
|  
 
|  
 
* [[Silicon Wafer Ctrl 3.2]]
 
* [[Silicon Wafer Ctrl 3.2]]
−
* [[Vial (Ammonium Fluoride Etchant)]]
+
* [[Vial (Positive Photoresist Developer)]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 3.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.2}}
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 3.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.2}}
−
{{Inventory/Slot|index=1|title=Vial (Ammonium Fluoride Etchant)|image=Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|amount=1}}
+
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist Developer)|image=Vessel_vial.png|link=Vial (Positive Photoresist Developer)|amount=1}}
 
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 3.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.3}}
 
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 3.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.3}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photoresist Photoresist (Wikipedia)]
 +
* [https://www.microchemicals.com/dokumente/application_notes/development_photoresist.pdf Photoresist Developers (Pdf)]
 +
 +
 +
* [https://www.youtube.com/watch?v=emUoFq5nRZM Quick intro to Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=-n0UKFgrLbo Photoresist Developer (Video)]
 
|}
 
|}
  
  
−
;Step 3.4 Use the Silicon Wafer Ctrl 3.3 and Vial (Photoresist Stripper SPM) in the Chemical Processor to remove the photoresist and obtain Silicon Wafer Ctrl 3.4.
+
;Step 3.4 Use the Silicon Wafer Ctrl 3.3 and Vial (Ammonium Fluoride Etchant) in the [[Chemical Processor]] to etch the metal contacts and obtain [[Silicon Wafer|Silicon Wafer Ctrl 3.4]].
 
===Chemical Processor===
 
===Chemical Processor===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 561: Line 725:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.4|32px|alt=Silicon Wafer Ctrl 3.4|[[Silicon Wafer Ctrl 3.4|Silicon Wafer Ctrl 3.4]]]] [[Silicon Wafer Ctrl 3.4|Silicon Wafer Ctrl 3.4]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.4|32px|alt=Silicon Wafer Ctrl 3.4]] [[Silicon Wafer Ctrl 3.4]]
 
|  
 
|  
 
* [[Silicon Wafer Ctrl 3.3]]
 
* [[Silicon Wafer Ctrl 3.3]]
 +
* [[Vial (Ammonium Fluoride Etchant)]]
 +
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 3.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.3}}
 +
{{Inventory/Slot|index=1|title=Vial (Ammonium Fluoride Etchant)|image=Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|amount=1}}
 +
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 3.4|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.4}}
 +
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 +
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 +
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
*[https://en.wikipedia.org/wiki/Etching_(microfabrication) Etching (Wikipedia)]
 +
*[https://www.hitachi-hightech.com/global/en/knowledge/semiconductor/room/manufacturing/etch.html What is a Etch system? (Website)]
 +
 +
 +
*[https://www.youtube.com/watch?v=2O1TyJGXuWY Quick intro to Etching (Video)]
 +
*[https://www.youtube.com/watch?v=po-nlRUQkbI&t=140s Etching (Video)]
 +
|}
 +
 +
 +
;Step 3.5 Use the Silicon Wafer Ctrl 3.4 and Vial (Photoresist Stripper SPM) in the Chemical Processor to remove the exposed photoresist and obtain [[Silicon Wafer|Silicon Wafer Ctrl 3.5]].
 +
===Chemical Processor===
 +
{| class="wikitable sortable collapsible"
 +
|-
 +
! Outputs
 +
! Components
 +
! Recipe
 +
! Do you want to know more?
 +
|-
 +
|
 +
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.5|32px|alt=Silicon Wafer Ctrl 3.5]] [[Silicon Wafer Ctrl 3.5]]
 +
|
 +
* [[Silicon Wafer Ctrl 3.4]]
 
* [[Vial (Photoresist Stripper SPM)]]
 
* [[Vial (Photoresist Stripper SPM)]]
 
| {{Inventory|
 
| {{Inventory|
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 3.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.3}}
+
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 3.4|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.4}}
 
{{Inventory/Slot|index=1|title=Vial (Photoresist Stripper SPM)|image=Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|amount=1}}
 
{{Inventory/Slot|index=1|title=Vial (Photoresist Stripper SPM)|image=Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|amount=1}}
−
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 3.4|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.4}}
+
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 3.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.5}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 3.5 Use the Silicon Wafer Ctrl 3.4 in the wafer washer to clean the wafer of photoresist residues and obtain Silicon Wafer Ctrl 3.5.
+
;Step 3.6 Use the Silicon Wafer Ctrl 3.5 in the wafer washer to clean the wafer of photoresist residues and obtain [[Silicon Wafer|Silicon Wafer Ctrl 3.6]].
 
===Wafer Washer===
 
===Wafer Washer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 584: Line 781:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.5|32px|alt=Silicon Wafer Ctrl 3.5|[[Silicon Wafer Ctrl 3.5|Silicon Wafer Ctrl 3.5]]]] [[Silicon Wafer Ctrl 3.5|Silicon Wafer Ctrl 3.5]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.6|32px|alt=Silicon Wafer Ctrl 3.6]] [[Silicon Wafer Ctrl 3.6]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 3.4]]
+
* [[Silicon Wafer Ctrl 3.5]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=1|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 3.4|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.4}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 3.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.5}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 3.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.5}}
+
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 3.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.6}}
 
|type=wafer-washer|shapeless=false}}
 
|type=wafer-washer|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 3.6 Use the Silicon Wafer Ctrl 3.5 and a copper nugget for Atomic Layer Deposition to create a copper layer in the wafer and obtain Silicon Wafer Ctrl 3.6.
+
;Step 3.7 Use the Silicon Wafer Ctrl 3.6 and a copper nugget for Atomic Layer Deposition to create a copper layer in the wafer and obtain [[Silicon Wafer|Silicon Wafer Ctrl 3.7]].
 
===Atomic Layer Deposition===
 
===Atomic Layer Deposition===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 606: Line 805:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.6|32px|alt=Silicon Wafer Ctrl 3.6|[[Silicon Wafer Ctrl 3.6|Silicon Wafer Ctrl 3.6]]]] [[Silicon Wafer Ctrl 3.6|Silicon Wafer Ctrl 3.6]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.7|32px|alt=Silicon Wafer Ctrl 3.7]] [[Silicon Wafer Ctrl 3.7]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 3.5]]
+
* [[Silicon Wafer Ctrl 3.6]]
 
* [[Copper Nugget]]
 
* [[Copper Nugget]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title= Copper Nugget|image= Copper_nugget.png|link=Copper Nugget|amount=1}}
 
{{Inventory/Slot|index=1|title= Copper Nugget|image= Copper_nugget.png|link=Copper Nugget|amount=1}}
−
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 3.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.5}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 3.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.6}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 3.6|image=Waferitem orange.png|link=Silicon Wafer Ctrl 3.6}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 3.7|image=Waferitem orange.png|link=Silicon Wafer Ctrl 3.7}}
 
|type=atomic-layer-deposition}}
 
|type=atomic-layer-deposition}}
 +
|
 
|}
 
|}
  
  
−
;Step 3.7 Use the Silicon Wafer Ctrl 3.6 in the chemical phisical polisher to strip the excess of metal and obtain a Unwashed Controller Die Wafer.
+
;Step 3.8 Use the Silicon Wafer Ctrl 3.7 in the chemical mechanical polisher to strip the excess of metal and obtain a Unwashed Controller Die Wafer.
 
===Chemical Mechanical Polisher===
 
===Chemical Mechanical Polisher===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 628: Line 829:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Unwashed Controller Die Wafer|32px|alt=Unwashed Controller Die Wafer|[[Unwashed Controller Die Wafer|Unwashed Controller Die Wafer]]]] [[Unwashed Controller Die Wafer|Unwashed Controller Die Wafer]]
+
* [[Image:silicon_wafer.png|link=Unwashed Controller Die Wafer|32px|alt=Unwashed Controller Die Wafer]] [[Unwashed Controller Die Wafer|Unwashed Controller Die Wafer]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 3.6]]
+
* [[Silicon Wafer Ctrl 3.7]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
−
{{Inventory/Slot|index=1|title=Silicon Wafer Ctrl 3.6|image=Waferitem orange.png|link=Silicon Wafer Ctrl 3.6}}
+
{{Inventory/Slot|index=1|title=Silicon Wafer Ctrl 3.7|image=Waferitem orange.png|link=Silicon Wafer Ctrl 3.7}}
 
{{Inventory/Slot|index=2|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=2|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=4|title=Unwashed Controller Die Wafer|image=Finished wafer.png|link=Unwashed Controller Die Wafer}}
 
{{Inventory/Slot|index=4|title=Unwashed Controller Die Wafer|image=Finished wafer.png|link=Unwashed Controller Die Wafer}}
 
|type=chemical-mechanical-polisher|shapeless=false}}
 
|type=chemical-mechanical-polisher|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 3.8 Use the Unwashed Controller Die Wafer in the Wafer Washer to clean the wafer of photoresist residues and obtain the Unchecked Controller Die Wafer.
+
;Step 3.9 Use the Unwashed Controller Die Wafer in the Wafer Washer to clean the wafer of photoresist residues and obtain the Unchecked Controller Die Wafer.
 
===Wafer Washer===
 
===Wafer Washer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 650: Line 853:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Controller Die Wafer|32px|alt=Controller Die Wafer|[[Unchecked Controller Die Wafer|Controller Die Wafer]]]] [[Unchecked Controller Die Wafer|Controller Die Wafer]]
+
* [[Image:silicon_wafer.png|link=Controller Die Wafer|32px|alt=Controller Die Wafer]] [[Unchecked Controller Die Wafer|Controller Die Wafer]]
 
|  
 
|  
 
* [[Unwashed Controller Die Wafer]]
 
* [[Unwashed Controller Die Wafer]]
Line 662: Line 866:
 
{{Inventory/Slot|index=4|title=Unchecked Controller Die Wafer|image=Finished wafer.png|link=Unchecked Controller Die Wafer}}
 
{{Inventory/Slot|index=4|title=Unchecked Controller Die Wafer|image=Finished wafer.png|link=Unchecked Controller Die Wafer}}
 
|type=wafer-washer|shapeless=false}}
 
|type=wafer-washer|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 3.9 Use the Unchecked Controller Die Wafer in the scanning electron microscope to check if there are any defects in the Controller Die Wafer.
+
;Step 3.10 Use the Unchecked Controller Die Wafer in the scanning electron microscope to check if there are any defects in the Controller Die Wafer.
 
===Scanning Electron Microscope===
 
===Scanning Electron Microscope===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
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* [[Image:silicon_wafer.png|link=Controller Die Wafer|32px|alt=Unchecked Controller Die Wafer|[[Controller Die Wafer|Unchecked Controller Die Wafer]]]] [[Controller Die Wafer|Unchecked Controller Die Wafer]]
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* [[Image:silicon_wafer.png|link=Controller Die Wafer|32px|alt=Unchecked Controller Die Wafer]] [[Controller Die Wafer|Unchecked Controller Die Wafer]]
 
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* [[Unchecked Controller Die Wafer|Controller Die Wafer]]
 
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{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
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{{Inventory/Slot|index=0|title=Unchecked Controller Die Wafer|image=Finished wafer.png|link=Controller Die Wafer}}
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{{Inventory/Slot|index=1|title=Unchecked Controller Die Wafer|image=Finished wafer.png|link=Controller Die Wafer}}
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{{Inventory/Slot|index=3|title=Controller Die Wafer|image=Finished wafer.png|link=Controller Die Wafer}}
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;Step 3.10 Use the Controller Die Wafer in the Stone Cutter to obtain the [[Controller Die]].
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;Step 3.11 Use the Controller Die Wafer in the Stone Cutter to obtain the [[Controller Die]].
 
===Stonecutter===
 
===Stonecutter===
 
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[https://gacbe.ac.in/images/E%20books/Fundamentals%20of%20Semiconductor%20Manufacturing%20and%20Process%20Control%20G.%20May%20C.%20Spanos.pdf Fundamentals of semiconductor manufacturing and process control from Gary S. May and Costas J. Spanos (Book PDF)]
 
[https://gacbe.ac.in/images/E%20books/Fundamentals%20of%20Semiconductor%20Manufacturing%20and%20Process%20Control%20G.%20May%20C.%20Spanos.pdf Fundamentals of semiconductor manufacturing and process control from Gary S. May and Costas J. Spanos (Book PDF)]
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[https://www.sciencedirect.com/science/article/pii/B9780128035818104333 Photolitography (Book PDF)]
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[https://semi.org/en/semi-university SEMI University]
 
[https://semi.org/en/semi-university SEMI University]
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Latest revision as of 01:21, 4 July 2024

Description

The idea behind the microcontroller unit is its role as a cost-effective and energy-efficient processor designed for specific applications. Over the past few years, some of these devices have significantly increased in capability, leading to a blurring of the traditional definition of a microcontroller. Nowadays, controller chips are integrated into various devices such as Metal Detectors, Wearables, SSDs and CPUs.

Recipes

The starting point for the controller chip is a n-type Silicon Wafer with a SiO2 layer.

Step 1.0 Get the Mask (Ctrl 1st well) from the Mask Writer.

Mask Writer

Outputs Components Recipe Do you want to know more?
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Water Bucket
Mask (Ctrl 1st Mask)



Step 1.1 Apply a Vial (Positive Photoresist) to the Silicon Wafer (N-type) SiO2 in the Chemical Solution Deposition machine and obtain the Silicon Wafer Ctrl 1.1.

Chemical Solution Deposition

Outputs Components Recipe Do you want to know more?
Fuel
Vial (Positive Photoresist)
Silicon Wafer (N-type) SiO2
Silicon Wafer Ctrl 1.1



Step 1.2 Use the Silicon Wafer Ctrl 1.1, Mask (Ctrl 1st well) and a UV bulb in the Contact Printer to imprint the pattern and obtain the Silicon Wafer Ctrl 1.2. For positive photoresist, the contact printer light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.

Contact Printer

Outputs Components Recipe Do you want to know more?
365 nm UV Bulbs
Mask (Ctrl 1st well)
Silicon Wafer Ctrl 1.1
Silicon Wafer Ctrl 1.2
Fuel



Step 1.3 Use the Silicon Wafer Ctrl 1.2 and Vial (Positive Photoresist Developer) in the Chemical Processor to remove the unexposed photoresist and obtain Silicon Wafer Ctrl 1.3.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 1.2
Vial (Positive Photoresist Developer)
1
Silicon Wafer Ctrl 1.3
Water Bucket
Water Bucket
Fuel



Step 1.4 Use the Silicon Wafer Ctrl 1.3 and Vial (Ammonium Fluoride Etchant) in the Chemical Processor to etch the 1st wells and obtain Silicon Wafer Ctrl 1.4.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 1.3
Vial (Ammonium Fluoride Etchant)
1
Silicon Wafer Ctrl 1.4
Water Bucket
Water Bucket
Fuel



Step 1.5 Use the Silicon Wafer Ctrl 1.4 and Vial (Photoresist Stripper SPM) in the Chemical Processor to remove the exposed photoresist and obtain Silicon Wafer Ctrl 1.5.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 1.4
Vial (Photoresist Stripper SPM)
1
Silicon Wafer Ctrl 1.5
Water Bucket
Water Bucket
Fuel


Step 1.6 Use the Silicon Wafer Ctrl 1.5 in the Wafer Washer to clean the wafer of photoresist residues and obtain Silicon Wafer Ctrl 1.6.

Wafer Washer

Outputs Components Recipe Do you want to know more?
Fuel
Water Bucket
Silicon Wafer Ctrl 1.5
Water Bucket
Silicon Wafer Ctrl 1.6


Step 1.7 Use the Silicon Wafer Ctrl 1.6, a bag of boron and Mask (Ctrl 1st well) in the Ion Beam to seed the 1st well with ions and obtain Silicon Wafer Ctrl 1.7.

Ion Implanter

Outputs Components Recipe Do you want to know more?
Fuel
Bag (Boron)
1
mask1
Silicon Wafer Ctrl 1.6
Silicon Wafer Ctrl 1.7
Water Bucket


Step 1.8 Use the Silicon Wafer Ctrl 1.7 and an Oxygen Cartridge in the O2 furnace to grow a SiO2 layer in the wafer and obtain Silicon Wafer Ctrl 1.8.

O2 Furnace

Outputs Components Recipe Do you want to know more?
Fuel
Cartridge (Oxygen)
1
Silicon Wafer Ctrl 1.7
Silicon Wafer Ctrl 1.8


Step 1.9 Use the Silicon Wafer Ctrl 1.8 in the scanning electron microscope to check if the 1st well was correctly created and obtain Silicon Wafer Ctrl 1.9.

Scanning Electron Microscope

Outputs Components Recipe Do you want to know more?
Fuel
Silicon Wafer Ctrl 1.8
Silicon Wafer Ctrl 1.9




Step 2.0 Get the Mask (Ctrl 2nd well) from the Mask Writer.

Mask Writer

Outputs Components Recipe Do you want to know more?
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Water Bucket
Mask (Ctrl 2nd well)



Step 2.1 Use the Silicon Wafer Ctrl 1.8 and a Vial (Positive Photoresist) in the Chemical Solution Deposition machine to obtain the Silicon Wafer Ctrl 2.1.

Chemical Solution Deposition

Outputs Components Recipe Do you want to know more?
Fuel
Vial (Positive Photoresist)
Silicon Wafer Ctrl 2.1
Silicon Wafer Ctrl 2.2


Step 2.2 Use the Silicon Wafer Ctrl 2.1, Mask (Ctrl 2nd well) and a UV bulb in the Contact Printer to imprint the etching pattern and obtain the Silicon Wafer Ctrl 2.3. For positive photoresist, the contact printer light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.

Contact Printer

Outputs Components Recipe Do you want to know more?
365 nm UV Bulbs
Mask (Ctrl 2nd well)
Vial (Positive Photoresist)
Silicon Wafer Ctrl 2.2
Silicon Wafer Ctrl 2.3
Fuel



Step 2.3 Use the Silicon Wafer Ctrl 2.2 and Vial (Positive Photoresist Developer) in the Chemical Processor to remove the unexposed photoresist and obtain Silicon Wafer Ctrl 2.3.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 2.2
Vial (Positive Photoresist Developer)
1
Silicon Wafer Ctrl 2.3
Water Bucket
Water Bucket
Fuel



Step 2.4 Use the Silicon Wafer Ctrl 2.3 and Vial (Ammonium Fluoride Etchant) in the Chemical Processor to etch the 2nd wells and obtain Silicon Wafer Ctrl 2.4.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 2.3
Vial (Ammonium Fluoride Etchant)
1
Silicon Wafer Ctrl 2.4
Water Bucket
Water Bucket
Fuel



Step 2.5 Use the Silicon Wafer Ctrl 2.4 and Vial (Photoresist Stripper SPM) in the Chemical Processor to remove the exposed photoresist and obtain Silicon Wafer Ctrl 2.5.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 2.4
Vial (Photoresist Stripper SPM)
1
Silicon Wafer Ctrl 2.5
Water Bucket
Water Bucket
Fuel


Step 2.6 Use the Silicon Wafer Ctrl 2.5 in the Wafer Washer to clean the wafer of photoresist residues and obtain Silicon Wafer Ctrl 2.6.

Wafer Washer

Outputs Components Recipe Do you want to know more?
Fuel
Water Bucket
Silicon Wafer Ctrl 2.5
Water Bucket
Silicon Wafer Ctrl 2.6


Step 2.7 Use the Silicon Wafer Ctrl 2.6, a bag of phosphorus and Mask (Ctrl 2nd well) in the Ion Bean to seed the 2nd well with ions and obtain Silicon Wafer Ctrl 2.7.

Ion Implanter

Outputs Components Recipe Do you want to know more?
Fuel
Bag (Phosphorus)
1
mask1
Silicon Wafer Ctrl 2.6
Silicon Wafer Ctrl 2.7
Water Bucket


Step 2.8 Use the Silicon Wafer Ctrl 2.7 and an Oxygen Cartridge in the O2 furnace to grow a SiO2 layer in the wafer and obtain Silicon Wafer Ctrl 2.8.

O2 Furnace

Outputs Components Recipe Do you want to know more?
Fuel
Cartridge (Oxygen)
1
Silicon Wafer Ctrl 2.7
Silicon Wafer Ctrl 2.8


Step 2.9 Use the Silicon Wafer Ctrl 2.8 in the scanning electron microscope to check if the 2st well was correctly created and obtain Silicon Wafer Ctrl 2.9.

Scanning Electron Microscope

Outputs Components Recipe Do you want to know more?
Fuel
Silicon Wafer Ctrl 2.8
Silicon Wafer Ctrl 2.9




Step 3.0 Get the Mask (Ctrl Metal) from the Mask Writer.

Mask Writer

Outputs Components Recipe Do you want to know more?
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Water Bucket
Mask (Ctrl Metal)



Step 3.1 Use the Silicon Wafer Ctrl 2.8, Mask (Ctrl Metal) and a Vial (Positive Photoresist) in the Chemical Solution Deposition machine to obtain the Silicon Wafer Ctrl 3.1.

Chemical Solution Deposition

Outputs Components Recipe Do you want to know more?
Fuel
Vial (Positive Photoresist)
Silicon Wafer Ctrl 2.8
Silicon Wafer Ctrl 3.1


Step 3.2 Use the Silicon Wafer Ctrl 3.1, Mask (Ctrl Metal), Vial (Positive Photoresist) and a UV bulb in the Contact Printer to imprint the etching pattern and obtain the Silicon Wafer Ctrl 3.2. For positive photoresist, the contact printer light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.

Contact Printer

Outputs Components Recipe Do you want to know more?
365 nm UV Bulbs
Mask (Ctrl Metal)
Silicon Wafer Ctrl 3.1
Silicon Wafer Ctrl 3.2
Fuel



Step 3.3 Use the Silicon Wafer Ctrl 3.2 and Vial (Positive Photoresist Developer) in the Chemical Processor to remove the unexposed photoresist and obtain Silicon Wafer Ctrl 3.3.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 3.2
Vial (Positive Photoresist Developer)
1
Silicon Wafer Ctrl 3.3
Water Bucket
Water Bucket
Fuel



Step 3.4 Use the Silicon Wafer Ctrl 3.3 and Vial (Ammonium Fluoride Etchant) in the Chemical Processor to etch the metal contacts and obtain Silicon Wafer Ctrl 3.4.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 3.3
Vial (Ammonium Fluoride Etchant)
1
Silicon Wafer Ctrl 3.4
Water Bucket
Water Bucket
Fuel



Step 3.5 Use the Silicon Wafer Ctrl 3.4 and Vial (Photoresist Stripper SPM) in the Chemical Processor to remove the exposed photoresist and obtain Silicon Wafer Ctrl 3.5.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 3.4
Vial (Photoresist Stripper SPM)
1
Silicon Wafer Ctrl 3.5
Water Bucket
Water Bucket
Fuel


Step 3.6 Use the Silicon Wafer Ctrl 3.5 in the wafer washer to clean the wafer of photoresist residues and obtain Silicon Wafer Ctrl 3.6.

Wafer Washer

Outputs Components Recipe Do you want to know more?
Fuel
Water Bucket
Silicon Wafer Ctrl 3.5
Water Bucket
Silicon Wafer Ctrl 3.6


Step 3.7 Use the Silicon Wafer Ctrl 3.6 and a copper nugget for Atomic Layer Deposition to create a copper layer in the wafer and obtain Silicon Wafer Ctrl 3.7.

Atomic Layer Deposition

Outputs Components Recipe Do you want to know more?
Fuel
Copper Nugget
1
Silicon Wafer Ctrl 3.6
Silicon Wafer Ctrl 3.7


Step 3.8 Use the Silicon Wafer Ctrl 3.7 in the chemical mechanical polisher to strip the excess of metal and obtain a Unwashed Controller Die Wafer.

Chemical Mechanical Polisher

Outputs Components Recipe Do you want to know more?
Fuel
Silicon Wafer Ctrl 3.7
Water Bucket
Water Bucket
Unwashed Controller Die Wafer


Step 3.9 Use the Unwashed Controller Die Wafer in the Wafer Washer to clean the wafer of photoresist residues and obtain the Unchecked Controller Die Wafer.

Wafer Washer

Outputs Components Recipe Do you want to know more?
Fuel
Water Bucket
Unwashed Controller Die Wafer
Water Bucket
Unchecked Controller Die Wafer


Step 3.10 Use the Unchecked Controller Die Wafer in the scanning electron microscope to check if there are any defects in the Controller Die Wafer.

Scanning Electron Microscope

Outputs Components Recipe Do you want to know more?
Fuel
Unchecked Controller Die Wafer
Controller Die Wafer


Step 3.11 Use the Controller Die Wafer in the Stone Cutter to obtain the Controller Die.

Stonecutter

Outputs Components Recipe Do you want to know more?
[Controller Die Wafer] Controller Die Wafer
Controller Die
16



Create the controller chip - Use a Controller Die, the Enclosure and the Interconnection Array in the Crafting Table to obtain the controller chip.

Crafting Table

Outputs Components Recipe Do you want to know more?
Enclosure
Controller Die
Interconnection Array
Controller Chip


History

Semiconductor module 1.0


Gallery

Controller chip.png


Links to learn more

Introduction to chemical processes for micro- and nanofabrication course from Chris Mack at the University of Texas at Austin (Videos)

Semiconductor fabrication 101 online course from Purdue University (MOC)

Semiconductor manufacturing from Duane Boning at MIT (Course materials)

Fundamentals of semiconductor manufacturing and process control from Gary S. May and Costas J. Spanos (Book PDF)

Photolitography (Book PDF)



Certification

Semiconductor fabrication 101 online course from Purdue University (MOC)

SEMI University



References

Silicon (Wikipedia)

Semiconductor fabrication 101 online course from Purdue University (MOC)

The Amazing, Humble Silicon Wafer Video from Asianometry (Youtube video)

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