Difference between revisions of "Controller Chip"

From PolyCraft World
Jump to navigation Jump to search
 
(100 intermediate revisions by 2 users not shown)
Line 13: Line 13:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:Itemmask.png|link=Mask (Ctrl 1st well)|32px|alt=Mask (Ctrl 1st well)|[[Mask (Ctrl 1st well)|Mask (Ctrl 1st well)]]]] [[Mask (Ctrl 1st well)|Mask (Ctrl 1st well)]]
+
* [[Image:Itemmask.png|link=Mask (Ctrl 1st well)|32px|alt=Mask (Ctrl 1st well)]] [[Mask (Ctrl 1st well)]]
 
|  
 
|  
−
* [[Aluminum Nugget|Aluminum Nugget]]
+
* [[Image:Aluminum_nugget.png|link=Aluminum Nugget|32px|alt=Aluminum Nugget]] [[Aluminum Nugget]]
−
| {{Inventory|{{Inventory/Slot|index=5|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
+
| {{Inventory|
 +
{{Inventory/Slot|index=5|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
{{Inventory/Slot|index=1|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
{{Inventory/Slot|index=1|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
{{Inventory/Slot|index=2|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
{{Inventory/Slot|index=2|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
Line 33: Line 35:
 
{{Inventory/Slot|index=26|title=Mask (Ctrl 1st Mask)|image=Itemmask.png|link=Mask (Ctrl 1st Mask)}}
 
{{Inventory/Slot|index=26|title=Mask (Ctrl 1st Mask)|image=Itemmask.png|link=Mask (Ctrl 1st Mask)}}
 
|type=machining-mill|shapeless=false}}
 
|type=machining-mill|shapeless=false}}
 +
|
 +
*[https://en.wikipedia.org/wiki/Photomask Photomask (Wikipedia)]
 +
 +
 +
*[https://www.youtube.com/watch?v=Pt9NEnWmyMo Photomask (Video)]
 
|}
 
|}
  
  
−
; Step 1.1 Apply a Vial (Positive Photoresist) to the Silicon Wafer (N-type) SiO2 in the [[Chemical Solution Deposition]] machine and obtain the Silicon Wafer Ctrl 1.1.
+
 
 +
; Step 1.1 Apply a [[Vial (Positive Photoresist)|positive photoresist vial)]] to the [[Silicon Wafer|silicon safer (N-type) SiO2]] in the [[Chemical Solution Deposition]] machine and obtain the [[Silicon Wafer|silicon wafer Ctrl 1.1]].
 
===Chemical Solution Deposition===
 
===Chemical Solution Deposition===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 43: Line 51:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.1|32px|alt=Silicon Wafer Ctrl 1.1]|[[Silicon Wafer Ctrl 1.1|Silicon Wafer Ctrl 1.1]]]] [[Silicon Wafer Ctrl 1.1|Silicon Wafer Ctrl 1.1]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.1|32px|alt=Silicon Wafer Ctrl 1.1]] [[Silicon Wafer|Silicon Wafer Ctrl 1.1]]
 
|  
 
|  
−
* [[Vial (Positive Photoresist)]]
+
* [[Image:Vessel_vial.png|link=Vial (Positive Photoresist)|32px|alt=Vial (Positive Photoresist)]] [[Vial (Positive Photoresist)]]
−
* [[Silicon Wafer (N-type) SiO2]]
+
* [[Image:silicon_wafer.png|link=Silicon Wafer|32px|alt=Silicon Wafer (N-type) SiO2]] [[Silicon Wafer|Silicon Wafer (N-type) SiO2]]
 
| {{Inventory|
 
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer (N-type) SiO2|image=Waferitem.png|link=Silicon Wafer (N-type) SiO2}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer (N-type) SiO2|image=Waferitem.png|link=Silicon Wafer}}
−
{{Inventory/Slot|index=5|title=Silicon Wafer Ctrl 1.1|image=Waferitem red.png|link=Silicon Wafer Ctrl 1.1}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.1|image=Waferitem red.png|link=Silicon Wafer Ctrl 1.1}}
−
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
 
|type=chemical-solution-deposition|shapeless=false}}
 
|type=chemical-solution-deposition|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photoresist Photoresist (Wikipedia)]
 +
* [https://en.wikipedia.org/wiki/Spin_coating Spin Coating (Wikipedia)]
 +
* [https://web.mit.edu/scholvin/www/nt245/Documents/resists.AN.spin_coating_photoresist.pdf Spin Coating of Photoresists (MIT)]
 +
 +
 +
* [https://www.youtube.com/watch?v=vobdNt81fOk Spin Coating (Youtube Video)]
 
|}
 
|}
  
  
−
; Step 1.2 Use the Silicon Wafer Ctrl 1.1, [[Mask (Ctrl 1st well)]] and a [[365 nm UV Bulbs|UV bulb]] in the [[Contact Printer]] to imprint the pattern and obtain the Silicon Wafer Ctrl 1.2.
+
; Step 1.2 Use the Silicon Wafer Ctrl 1.1, [[Mask (Ctrl 1st well)]] and a [[365 nm UV Bulbs|UV bulb]] in the [[Contact Printer]] to imprint the pattern and obtain the [[Silicon Wafer|Silicon Wafer Ctrl 1.2]]. For positive photoresist, the contact printer light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.  
 
===Contact Printer===
 
===Contact Printer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 65: Line 81:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1|32px|alt=Silicon Wafer Ctrl 1]|[[Silicon Wafer Ctrl 1|Silicon Wafer Ctrl 1]]]] [[Silicon Wafer Ctrl 1|Silicon Wafer Ctrl 1]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.2|32px|alt=Silicon Wafer]] [[Silicon Wafer|Silicon Wafer Ctrl 1.2]]
 
|  
 
|  
−
* [[365 nm UV Bulbs]]
+
* [[Image:365_nm_uv_bulbs.png|link=365 nm UV Bulbs|32px|alt=365 nm UV Bulbs]] [[365 nm UV Bulbs]]
−
* [[Mask (Ctrl 1st well)]]
+
* [[Image:Itemmask.png|link=Mask (Ctrl 1st well)|32px|alt=Mask (Ctrl 1st well)]] [[Mask (Ctrl 1st well)]]
−
* [[Silicon Wafer Ctrl 1.1]]
+
* [[Image:Waferitem red.png|link=Silicon Wafer Ctrl 1.1|32px|alt=Silicon Wafer]] [[Silicon Wafer|Silicon Wafer Ctrl 1.1]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=365 nm UV Bulbs|image=365_nm_uv_bulbs.png|link=365 nm UV Bulbs}}
 
{{Inventory/Slot|index=0|title=365 nm UV Bulbs|image=365_nm_uv_bulbs.png|link=365 nm UV Bulbs}}
 
{{Inventory/Slot|index=2|title=Mask (Ctrl 1st well)|image=Itemmask.png|link=Mask (Ctrl 1st well)}}
 
{{Inventory/Slot|index=2|title=Mask (Ctrl 1st well)|image=Itemmask.png|link=Mask (Ctrl 1st well)}}
 
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.1|image=Waferitem red.png|link=Silicon Wafer Ctrl 1.1}}
 
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.1|image=Waferitem red.png|link=Silicon Wafer Ctrl 1.1}}
−
{{Inventory/Slot|index=5|title=Silicon Wafer Ctrl 1.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.2}}
+
{{Inventory/Slot|index=5|title=Silicon Wafer Ctrl 1.2|image=Waferitem red pattern.png|link=Silicon Wafer}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
|type=contact-printer|shapeless=false}}
 
|type=contact-printer|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photolithography Photolitography (Wikipedia)]
 +
 +
 +
* [https://www.youtube.com/watch?v=emUoFq5nRZM Quick intro to Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=B0g1_rr-ApI Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=udXHWVejDj0 Photolitography (Video)]
 +
 +
 +
*[https://www.sciencedirect.com/science/article/pii/B9780128035818104333 Photolitography (Book PDF)]
 
|}
 
|}
  
  
−
; Step 1.3 Use the Silicon Wafer Ctrl 1.2 and Vial (Ammonium Fluoride Etchant) in the [[Chemical Processor]] to etch the 1st wells and obtain Silicon Wafer Ctrl 1.3.
+
; Step 1.3 Use the [[Silicon Wafer|silicon wafer Ctrl 1.2]] and [[Vial (Positive Photoresist Developer)|positive photoresist developer vial]] in the [[Chemical Processor]] to remove the unexposed photoresist and obtain [[Silicon Wafer|silicon wafer Ctrl 1.3]].
 
===Chemical Processor===
 
===Chemical Processor===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 89: Line 116:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.3|32px|alt=Silicon Wafer Ctrl 1.3|[[Silicon Wafer Ctrl 1.3|Silicon Wafer Ctrl 1.3]]]] [[Silicon Wafer Ctrl 1.3|Silicon Wafer Ctrl 1.3]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.3|32px|alt=Silicon Wafer Ctrl 1.3]] [[Silicon Wafer|Silicon Wafer Ctrl 1.3]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 1.2]]
+
* [[Image:Vessel_vial.png|link=Vial (Positive Photoresist Developer)|32px|alt=Vial (Positive Photoresist Developer)]] [[Vial (Positive Photoresist Developer)]]
−
* [[Vial (Ammonium Fluoride Etchant)]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.2|32px|alt=Silicon Wafer Ctrl 1.2]] [[Silicon Wafer|Silicon Wafer Ctrl 1.2]]
 
| {{Inventory|
 
| {{Inventory|
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.2}}
+
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.2|image=Waferitem red pattern.png|link=Silicon Wafer}}
 +
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist Developer)|image=Vessel_vial.png|link=Vial (Positive Photoresist Developer)|amount=1}}
 +
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 1.3|image=Waferitem red pattern.png|link=Silicon Wafer}}
 +
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 +
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 +
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photoresist Photoresist (Wikipedia)]
 +
* [https://www.microchemicals.com/dokumente/application_notes/development_photoresist.pdf Photoresist Developers (Pdf)]
 +
 
 +
 
 +
* [https://www.youtube.com/watch?v=emUoFq5nRZM Quick intro to Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=-n0UKFgrLbo Photoresist Developer (Video)]
 +
|}
 +
 
 +
 
 +
; Step 1.4 Use the [[Silicon Wafer|silicon wafer Ctrl 1.3]] and [[Vial (Ammonium Fluoride Etchant)|ammonium fluoride etchant vial]] in the [[Chemical Processor]] to etch the 1st wells and obtain [[Silicon Wafer|silicon wafer Ctrl 1.4]].
 +
===Chemical Processor===
 +
{| class="wikitable sortable collapsible"
 +
|-
 +
! Outputs
 +
! Components
 +
! Recipe
 +
! Do you want to know more?
 +
|-
 +
|
 +
* [[Image:Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.4|32px|alt=Silicon Wafer Ctrl 1.4]] [[Silicon Wafer|Silicon Wafer Ctrl 1.4]]
 +
|
 +
* [[Image:Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|32px|alt=Vial (Ammonium Fluoride Etchant)]] [[Vial (Ammonium Fluoride Etchant)]]
 +
* [[Image:Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.3|32px|alt=Silicon Wafer Ctrl 1.3]] [[Silicon Wafer|Silicon Wafer Ctrl 1.3]]
 +
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.3}}
 
{{Inventory/Slot|index=1|title=Vial (Ammonium Fluoride Etchant)|image=Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|amount=1}}
 
{{Inventory/Slot|index=1|title=Vial (Ammonium Fluoride Etchant)|image=Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|amount=1}}
−
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 1.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.3}}
+
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 1.4|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.4}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
*[https://en.wikipedia.org/wiki/Etching_(microfabrication) Etching (Wikipedia)]
 +
*[https://www.hitachi-hightech.com/global/en/knowledge/semiconductor/room/manufacturing/etch.html What is a Etch system? (Website)]
 +
 +
 +
*[https://www.youtube.com/watch?v=2O1TyJGXuWY Quick intro to Etching (Video)]
 +
*[https://www.youtube.com/watch?v=po-nlRUQkbI&t=140s Etching (Video)]
 
|}
 
|}
  
  
−
; Step 1.4 Use the Silicon Wafer Ctrl 1.3 and Vial (Photoresist Stripper SPM) in the [[Chemical Processor]] to remove the photoresist and obtain Silicon Wafer Ctrl 1.4.
+
; Step 1.5 Use the [[Silicon Wafer|silicon wafer Ctrl 1.4]] and a [[Vial (Photoresist Stripper SPM)|photoresist stripper SPM vial]] in the [[Chemical Processor]] to remove the exposed photoresist and obtain [[Silicon Wafer|silicon wafer Ctrl 1.5]].
 
===Chemical Processor===
 
===Chemical Processor===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 112: Line 178:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.4|32px|alt=Silicon Wafer Ctrl 1.4|[[Silicon Wafer Ctrl 1.4|Silicon Wafer Ctrl 1.4]]]] [[Silicon Wafer Ctrl 1.4|Silicon Wafer Ctrl 1.4]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.5|32px|alt=Silicon Wafer]] [[Silicon Wafer|Silicon Wafer Ctrl 1.5]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 1.3]]
+
* [[Image:Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|32px|alt=Vial (Photoresist Stripper SPM)]] [[Vial (Photoresist Stripper SPM)]]
−
* [[Vial (Photoresist Stripper SPM)]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.4|32px|alt=Silicon Wafer]] [[Silicon Wafer|Silicon Wafer Ctrl 1.4]]
 
| {{Inventory|
 
| {{Inventory|
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.3}}
+
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.4|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 1.4}}
 
{{Inventory/Slot|index=1|title=Vial (Photoresist Stripper SPM)|image=Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|amount=1}}
 
{{Inventory/Slot|index=1|title=Vial (Photoresist Stripper SPM)|image=Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|amount=1}}
−
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 1.4|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.4}}
+
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 1.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.5}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
* [https://microtechprocess.com/wp-content/uploads/2018/04/MTS_SPM.pdf Photoresist Stripers (PDF)]
 +
 +
 +
* [https://www.youtube.com/watch?v=070--bHL3pI Quick intro to Photoresist Stripers (Video)]
 +
* [https://www.youtube.com/watch?v=gwtsXK6Fil8 Photoresist Stripers (Video)]
 
|}
 
|}
  
  
−
; Step 1.5 Use the Silicon Wafer Ctrl 1.4 in the Wafer Washer to clean the wafer of photoresist residues and obtain Silicon Wafer Ctrl 1.5.
+
; Step 1.6 Use the [[Silicon Wafer|silicon wafer Ctrl 1.5]] in the [[Wafer Washer|wafer washer]] to clean the wafer of photoresist residues and obtain [[Silicon Wafer|silicon wafer Ctrl 1.6]].
 
===Wafer Washer===
 
===Wafer Washer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 135: Line 208:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.5|32px|alt=Silicon Wafer Ctrl 1.5|[[Silicon Wafer Ctrl 1.5|Silicon Wafer Ctrl 1.5]]]] [[Silicon Wafer Ctrl 1.5|Silicon Wafer Ctrl 1.5]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.6|32px|alt=Silicon Wafer Ctrl 1.6]] [[Silicon Wafer|Silicon Wafer Ctrl 1.6]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 1.4]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.5|32px|alt=Silicon Wafer]] [[Silicon Wafer|Silicon Wafer Ctrl 1.5]]
 +
 
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=1|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 1.4|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.4}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 1.5|image=Silicon wafer blue.png|link=Silicon Wafer}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 1.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.5}}
+
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 1.6|image=Silicon wafer blue.png|link=Silicon Wafer}}
 
|type=wafer-washer|shapeless=false}}
 
|type=wafer-washer|shapeless=false}}
 +
|
 +
* [https://easycleanway.com/how-to-clean-silicon-wafer/ Silicon Wafer Cleaning (Website)]
 +
* [https://www.universitywafer.com/how-to-clean-silicon-wafers.html Silicon Wafer Cleaning (Website)]
 +
 +
 +
* [https://www.youtube.com/watch?v=11sJQaFCGHE Quick intro to Silicon Wafer Cleaning (Video)]
 +
* [https://www.youtube.com/watch?v=uVwMf6agSkw Silicon Wafer Cleaning (Video)]
 +
 +
 +
* [https://www.sciencedirect.com/science/article/pii/B9780323510844000010 Handbook of Silicon Wafer Cleaning Technology (Third Edition) (Book PDF)]
 +
* [https://www.static-contents.youth4work.com/y4w/fc469004-19c4-4401-81ce-90d5c073564d.pdf Silicon Wafer Cleaning (Paper PDF)]
 
|}
 
|}
  
  
−
; Step 1.6 Use the Silicon Wafer Ctrl 1.5, a bag of boron and Mask (Ctrl 1st well) in the Ion Bean to seed the 1st well with ions and obtain Silicon Wafer Ctrl 1.6.
+
; Step 1.7 Use the [[Silicon Wafer|silicon wafer Ctrl 1.6]] and a bag of boron in the [[Ion Beam]] to seed the 1st well with ions and obtain [[Silicon Wafer|silicon wafer Ctrl 1.7]].
 
===Ion Implanter===
 
===Ion Implanter===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 157: Line 243:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.6|32px|alt=Silicon Wafer Ctrl 1.6|[[Silicon Wafer Ctrl 1.6|Silicon Wafer Ctrl 1.6]]]] [[Silicon Wafer Ctrl 1.6|Silicon Wafer Ctrl 1.6]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.7|32px|alt=Silicon Wafer]] [[Silicon Wafer|Silicon Wafer Ctrl 1.7]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 1.5]]
+
* [[Image:Vessel_bag.png|link=Bag (Boron)|32px|alt=Bag (Boron)]] [[Bag (Boron)]]
−
* [[Bag (Boron)]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.6|32px|alt=Silicon Wafer]] [[Silicon Wafer|Silicon Wafer Ctrl 1.6]]
−
* [[Mask (Ctrl 1st well)]]
 
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Bag (Boron)|image=Vessel_bag.png|link=Bag (Boron)|amount=1}}
 
{{Inventory/Slot|index=1|title=Bag (Boron)|image=Vessel_bag.png|link=Bag (Boron)|amount=1}}
−
{{Inventory/Slot|index=2|title=mask1|image=Itemmask.png|link=mask1}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.6}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.5}}
+
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 1.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.7}}
−
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 1.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.6}}
 
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
|type=ion-implanter|shapeless=false}}
 
|type=ion-implanter|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Doping_(semiconductor) Doping (Wikipedia)]
 +
 +
 +
* [https://www.youtube.com/watch?v=LDUeNI1p5fQ Doping (Video)]
 +
* [https://www.youtube.com/watch?v=5ZNeDxfgYAE P-Type and N-Type Semiconductors(Video)]
 +
* [https://www.youtube.com/watch?v=2fizX2B3sUA Doping Lecture (Video)]
 
|}
 
|}
  
  
−
;Step 1.7 Use the Silicon Wafer Ctrl 1.6 and an Oxygen Cartridge in the O2 furnace to grow a SiO2 layer in the wafer and obtain Wafer Ctrl 1.7.
+
; Step 1.8 The implantation process disrupted the silicon crystal structure. To smooth and repair the silicon crystal, take the [[Silicon Wafer|silicon wafer Ctrl 1.7]] to the [[Annealing Furnace|annealing furnace]] with an [[Cartridge (Argon)|argon cartridge]] and obtain [[Silicon Wafer|silicon wafer Ctrl 1.8]].  
−
===O2 Furnace===
+
===Annealing Furnace===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
 
|-
 
|-
Line 182: Line 274:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.7|32px|alt=Silicon Wafer Ctrl 1.7|[[Silicon Wafer Ctrl 1.7|Silicon Wafer Ctrl 1.7]]]] [[Silicon Wafer Ctrl 1.7|Silicon Wafer Ctrl 1.7]]
+
* [[Image:Silicon wafer blue.png|link=v|32px|alt=Silicon Wafer Ctrl 1.8]] [[Silicon Wafer|Silicon Wafer Ctrl 1.8]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 1.6]]
+
* [[Image:Vessel_cartridge.png|link=Cartridge (Argon)|32px|alt=Cartridge (Argon)]] [[Cartridge (Argon)]]
−
* [[Cartridge (Oxygen)]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 1.7]] [[Silicon Wafer|Silicon Wafer Ctrl 1.7]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
−
{{Inventory/Slot|index=1|title=Cartridge (Oxygen)|image=Vessel_cartridge.png|link=Cartridge (Oxygen)|amount=1}}
+
{{Inventory/Slot|index=1|title=Cartridge (Argon)|image=Vessel_cartridge.png|link=Cartridge (Argon)|amount=1}}
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.6}}
+
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.7|image=Silicon wafer blue.png|link=Silicon Wafer}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.7}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.8|image=Silicon wafer blue.png|link=Silicon Wafer}}
 
|type=o2_furnace|shapeless=false}}
 
|type=o2_furnace|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Annealing_(materials_science) Annealing (Wikipedia)]
 
|}
 
|}
  
  
−
;Step 1.8 Use the Silicon Wafer Ctrl 1.7 in the scanning electron microscope to check if the 1st well was correctly created and obtain Wafer Ctrl 1.8.
+
;Step 1.9 Use the [[Silicon Wafer|silicon wafer Ctrl 1.8]] and an [[Cartridge (Oxygen)|oxygen cartridge]] in the [[O2 Furnace|O2 furnace]] to grow a SiO2 layer in the wafer and obtain [[Silicon Wafer|silicon wafer Ctrl 1.9]].
 
===O2 Furnace===
 
===O2 Furnace===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 204: Line 299:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 1.8|32px|alt=Silicon Wafer Ctrl 1.8|[[Silicon Wafer Ctrl 1.8|Silicon Wafer Ctrl 1.8]]]] [[Silicon Wafer Ctrl 1.8|Silicon Wafer Ctrl 1.8]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.9|32px|alt=Silicon Wafer Ctrl 1.9]] [[Silicon Wafer|Silicon Wafer Ctrl 1.9]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 1.7]]
+
* [[Image:Vessel_cartridge.png|link=Cartridge (Oxygen)|32px|alt=Cartridge (Oxygen)]] [[Cartridge (Oxygen)]]
 +
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer|Silicon Wafer Ctrl 1.8]] [[Silicon Wafer|Silicon Wafer Ctrl 1.8]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.7}}
+
{{Inventory/Slot|index=1|title=Cartridge (Oxygen)|image=Vessel_cartridge.png|link=Cartridge (Oxygen)|amount=1}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.8|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.8}}
+
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 1.8|image=Silicon wafer blue.png|link=Silicon Wafer}}
 +
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 1.9|image=Silicon wafer blue.png|link=Silicon Wafer}}
 
|type=o2_furnace|shapeless=false}}
 
|type=o2_furnace|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Thermal_oxidation Thermal Oxydation (Wikipedia)]
 +
 +
 +
* [https://www.youtube.com/watch?v=1Lh4EfEsELY Thermal Oxydation (Video)]
 +
* [https://www.youtube.com/watch?v=gOdVI8wuWUs Thermal Oxidation Lecture (Video)]
 
|}
 
|}
  
 +
 +
;Step 1.10 Use the [[Silicon Wafer|silicon wafer Ctrl 1.9]] in the [Scanning Electron Microscope|scanning electron microscope] to check if the 1st well was correctly created and obtain [[Silicon Wafer|silicon wafer Ctrl 1.10]].
 +
===Scanning Electron Microscope===
 +
{| class="wikitable sortable collapsible"
 +
|-
 +
! Outputs
 +
! Components
 +
! Recipe
 +
! Do you want to know more?
 +
|-
 +
|
 +
* [[Image:Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.10|32px|alt=Silicon Wafer Ctrl 1.10]] [[Silicon Wafer|Silicon Wafer Ctrl 1.10]]
 +
|
 +
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer|Silicon Wafer Ctrl 1.9]] [[Silicon Wafer|Silicon Wafer Ctrl 1.9]]
 +
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 +
{{Inventory/Slot|index=1|title=Silicon Wafer Ctrl 1.9|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.9}}
 +
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 1.10|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.10}}
 +
|type=scanning-electron-microscope|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Scanning_electron_microscope Scanning Electron Microscope (Wikipedia)]
 +
 +
|}
  
  
Line 223: Line 350:
  
  
−
;Step 2.0 Get the Mask (Ctrl 2nd well) from the [[Mask Writer]]..
+
;Step 2.0 Get the [[Mask (Ctrl 2nd well)]] from the [[Mask Writer|mask writer]].
 
===Mask Writer===
 
===Mask Writer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 230: Line 357:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:Itemmask.png|link=Mask (Ctrl 2nd well)|32px|alt=Mask (Ctrl 2nd well)|[[Mask (Ctrl 2nd well)|Mask (Ctrl 2nd well)]]]] [[Mask (Ctrl 2nd well)|Mask (Ctrl 2nd well)]]
+
* [[Image:Itemmask.png|link=Mask (Ctrl 2nd well)|32px|alt=Mask (Ctrl 2nd well)]] [[Mask (Ctrl 2nd well)]]
 
|  
 
|  
−
* [[Aluminum Nugget|Aluminum Nugget]]
+
* [[Image:Aluminum_nugget.png|link=Aluminum Nugget|32px|alt=Aluminum Nugget]] [[Mask (Ctrl 2nd well)]]
 
| {{Inventory|{{Inventory/Slot|index=14|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
| {{Inventory|{{Inventory/Slot|index=14|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
{{Inventory/Slot|index=1|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
{{Inventory/Slot|index=1|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
Line 257: Line 385:
 
{{Inventory/Slot|index=25|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=25|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=26|title=Mask (Ctrl 2nd well)|image=Itemmask.png|link=Mask (Ctrl 2nd well)}}|type=machining-mill|shapeless=false}}
 
{{Inventory/Slot|index=26|title=Mask (Ctrl 2nd well)|image=Itemmask.png|link=Mask (Ctrl 2nd well)}}|type=machining-mill|shapeless=false}}
 +
|
 +
*[https://en.wikipedia.org/wiki/Photomask Photomask (Wikipedia)]
 +
 +
 +
*[https://www.youtube.com/watch?v=Pt9NEnWmyMo Photomask (Video)]
 
|}
 
|}
  
  
−
;Step 2.1 Use the Silicon Wafer Ctrl 1.8 and a Vial (Positive Photoresist) in the [[Chemical Solution Deposition]] machine to obtain the Silicon Wafer Ctrl 2.1.
+
;Step 2.1 Use the [[Silicon Wafer|silicon wafer Ctrl 1.9]] and a [[Vial (Positive Photoresist)|positive photoresist vial]] in the [[Chemical Solution Deposition]] machine to obtain the [[Silicon Wafer|silicon wafer Ctrl 2.1]].
  
−
===Contact Printer===
+
===Chemical Solution Deposition===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
 
|-
 
|-
Line 268: Line 401:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.2|32px|alt=Silicon Wafer Ctrl 2.2]|[[Silicon Wafer Ctrl 2.2|Silicon Wafer Ctrl 2.2]]]] [[Silicon Wafer Ctrl 2.2|Silicon Wafer Ctrl 2.2]]
+
* [[Image:Waferitem red.png|link=Silicon Wafer Ctrl 2.1|32px|alt=Silicon Wafer Ctrl 2.1]] [[Silicon Wafer|Silicon Wafer Ctrl 2.1]]
 
|  
 
|  
−
* [[Vial (Positive Photoresist)]]
+
* [[Image:Vessel_vial.png|link=Vial (Positive Photoresist)|32px|alt=Vial (Positive Photoresist)]] [[Vial (Positive Photoresist)]]
−
* [[Silicon Wafer Ctrl 2.1]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 1.9]] [[Silicon Wafer|Silicon Wafer Ctrl 1.9]]
 
| {{Inventory|
 
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.1|image=Waferitem.png|link=Silicon Wafer Ctrl 2.1}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 1.9|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 1.9}}
−
{{Inventory/Slot|index=5|title=Silicon Wafer Ctrl 2.2|image=Waferitem red.png|link=Silicon Wafer Ctrl 2.2}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.1|image=Waferitem red.png|link=Silicon Wafer Ctrl 2.1}}
−
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
+
|type=chemical-solution-deposition|shapeless=false}}
−
|type=contact-printer|shapeless=false}}
+
|
 +
* [https://en.wikipedia.org/wiki/Photoresist Photoresist (Wikipedia)]
 +
* [https://en.wikipedia.org/wiki/Spin_coating Spin Coating (Wikipedia)]
 +
* [https://web.mit.edu/scholvin/www/nt245/Documents/resists.AN.spin_coating_photoresist.pdf Spin Coating of Photoresists (MIT)]
 
|}
 
|}
  
  
−
;Step 2.2 Use the Silicon Wafer Ctrl 2.1, Mask (Ctrl 2nd well) and a UV bulb in the [[Contact Printer]] to imprint the etching pattern and obtain the Silicon Wafer Ctrl 2.3.
+
;Step 2.2 Use the [[Silicon Wafer|silicon wafer Ctrl 2.1]], [[Mask (Ctrl 2nd well)]] and a [[365 nm UV Bulbs]] in the [[Contact Printer]] to imprint the etching pattern and obtain the [[Silicon Wafer|silicon wafer Ctrl 2.3]]. For positive photoresist, the contact printer light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.  
  
 
===Contact Printer===
 
===Contact Printer===
Line 291: Line 429:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.3|32px|alt=Silicon Wafer Ctrl 2.3]|[[Silicon Wafer Ctrl 2.3|Silicon Wafer Ctrl 2.3]]]] [[Silicon Wafer Ctrl 2.3|Silicon Wafer Ctrl 2.3]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.2|32px|alt=Silicon Wafer Ctrl 2.2]] [[Silicon Wafer|Silicon Wafer Ctrl 2.2]]
 
|  
 
|  
−
* [[365 nm UV Bulbs]]
+
* [[Image:365_nm_uv_bulbs.png|link=365 nm UV Bulbs|32px|alt=365 nm UV Bulbs]] [[365 nm UV Bulbs]]
−
* [[Mask (Ctrl 2nd well)]]
+
* [[Image:Itemmask.png|link=Mask (Ctrl 2nd well)|32px|alt=Mask (Ctrl 2nd well)]] [[Mask (Ctrl 2nd well)]]
−
* [[Silicon Wafer Ctrl 2.2]]
+
* [[Image:Waferitem red.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.1]] [[Silicon Wafer|Silicon Wafer Ctrl 2.1]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=365 nm UV Bulbs|image=365_nm_uv_bulbs.png|link=365 nm UV Bulbs}}
 
{{Inventory/Slot|index=0|title=365 nm UV Bulbs|image=365_nm_uv_bulbs.png|link=365 nm UV Bulbs}}
 
{{Inventory/Slot|index=2|title=Mask (Ctrl 2nd well)|image=Itemmask.png|link=Mask (Ctrl 2nd well)}}
 
{{Inventory/Slot|index=2|title=Mask (Ctrl 2nd well)|image=Itemmask.png|link=Mask (Ctrl 2nd well)}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.2|image=Waferitem red.png|link=Silicon Wafer Ctrl 2.2}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.1|image=Waferitem red.png|link=Silicon Wafer Ctrl 2.1}}
−
{{Inventory/Slot|index=5|title=Silicon Wafer Ctrl 2.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.3}}
+
{{Inventory/Slot|index=5|title=Silicon Wafer Ctrl 2.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.2}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
|type=contact-printer|shapeless=false}}
 
|type=contact-printer|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photolithography Photolitography (Wikipedia)]
 +
 +
 +
* [https://www.youtube.com/watch?v=emUoFq5nRZM Quick intro to Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=udXHWVejDj0 Photolitography (Video)]
 +
 +
 +
* [https://www.sciencedirect.com/science/article/pii/B9780128035818104333 Photolitography (Book PDF)]
 
|}
 
|}
  
  
−
;Step 2.3 Use the Silicon Wafer Ctrl 2.2 and Vial (Ammonium Fluoride Etchant) in the [[Chemical Processor]] to etch the 2nd wells and obtain Silicon Wafer Ctrl 2.3.
+
;Step 2.3 Use the [[Silicon Wafer|silicon wafer Ctrl 2.2]] and [[Vial (Positive Photoresist Developer)|positive photoresist developer vial]] in the [[Chemical Processor]] to remove the unexposed photoresist and obtain [[Silicon Wafer|silicon wafer Ctrl 2.3]].
 
===Chemical Processor===
 
===Chemical Processor===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 316: Line 464:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.3|32px|alt=Silicon Wafer Ctrl 2.3|[[Silicon Wafer Ctrl 2.3|Silicon Wafer Ctrl 2.3]]]] [[Silicon Wafer Ctrl 2.3|Silicon Wafer Ctrl 2.3]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.3]] [[Silicon Wafer|Silicon Wafer Ctrl 2.3]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 2.2]]
+
* [[Image:Vessel_vial.png|link=Silicon Wafer|32px|alt=Vial (Positive Photoresist Developer)]] [[Vial (Positive Photoresist Developer)]]
−
* [[Vial (Ammonium Fluoride Etchant)]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.2]] [[Silicon Wafer|Silicon Wafer Ctrl 2.2]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.2}}
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.2}}
−
{{Inventory/Slot|index=1|title=Vial (Ammonium Fluoride Etchant)|image=Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|amount=1}}
+
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist Developer)|image=Vessel_vial.png|link=Vial (Positive Photoresist Developer)|amount=1}}
 
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 2.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.3}}
 
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 2.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.3}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photoresist Photoresist (Wikipedia)]
 +
* [https://www.microchemicals.com/dokumente/application_notes/development_photoresist.pdf Photoresist Developers (Pdf)]
 +
 +
 +
* [https://www.youtube.com/watch?v=emUoFq5nRZM Quick intro to Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=-n0UKFgrLbo Photoresist Developer (Video)]
 
|}
 
|}
  
  
−
;Step 2.4 Use the Silicon Wafer Ctrl 2.3 and Vial (Photoresist Stripper SPM) in the [[Chemical Processor]] to remove the photoresist and obtain Silicon Wafer Ctrl 2.4.
+
;Step 2.4 Use the [[Silicon Wafer|silicon wafer Ctrl 2.3]] and [[Vial (Ammonium Fluoride Etchant)|ammonium fluoride etchant vial]] in the [[Chemical Processor]] to etch the 2nd wells and obtain [[Silicon Wafer|silicon wafer Ctrl 2.4]].
 
===Chemical Processor===
 
===Chemical Processor===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 339: Line 495:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.4|32px|alt=Silicon Wafer Ctrl 2.4|[[Silicon Wafer Ctrl 2.4|Silicon Wafer Ctrl 2.4]]]] [[Silicon Wafer Ctrl 2.4|Silicon Wafer Ctrl 2.4]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.4]] [[Silicon Wafer|Silicon Wafer Ctrl 2.4]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 2.3]]
+
* [[Image:Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|32px|alt=Vial (Ammonium Fluoride Etchant)]] [[Vial (Ammonium Fluoride Etchant)]]
−
* [[Vial (Photoresist Stripper SPM)]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.3]] [[Silicon Wafer|Silicon Wafer Ctrl 2.3]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.3}}
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.3}}
 +
{{Inventory/Slot|index=1|title=Vial (Ammonium Fluoride Etchant)|image=Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|amount=1}}
 +
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 2.4|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.4}}
 +
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 +
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 +
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
*[https://en.wikipedia.org/wiki/Etching_(microfabrication) Etching (Wikipedia)]
 +
*[https://www.hitachi-hightech.com/global/en/knowledge/semiconductor/room/manufacturing/etch.html What is a Etch system? (Website)]
 +
 +
 +
*[https://www.youtube.com/watch?v=2O1TyJGXuWY Quick intro to Etching (Video)]
 +
*[https://www.youtube.com/watch?v=po-nlRUQkbI&t=140s Etching (Video)]
 +
|}
 +
 +
 +
;Step 2.5 Use the [[Silicon Wafer|silicon wafer Ctrl 2.4]] and [[Vial (Photoresist Stripper SPM)|photoresist stripper SPM vial]] in the [[Chemical Processor]] to remove the exposed photoresist and obtain [[Silicon Wafer|silicon wafer Ctrl 2.5]].
 +
===Chemical Processor===
 +
{| class="wikitable sortable collapsible"
 +
|-
 +
! Outputs
 +
! Components
 +
! Recipe
 +
! Do you want to know more?
 +
|-
 +
|
 +
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.5]] [[Silicon Wafer|Silicon Wafer Ctrl 2.5]]
 +
|
 +
* [[Image:Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|32px|alt=Vial (Photoresist Stripper SPM)]] [[Vial (Photoresist Stripper SPM)]]
 +
* [[Image:Waferitem red pattern.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.4]] [[Silicon Wafer|Silicon Wafer Ctrl 2.4]]
 +
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.4|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 2.4}}
 
{{Inventory/Slot|index=1|title=Vial (Photoresist Stripper SPM)|image=Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|amount=1}}
 
{{Inventory/Slot|index=1|title=Vial (Photoresist Stripper SPM)|image=Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|amount=1}}
−
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 2.4|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.4}}
+
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 2.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.5}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
* [https://microtechprocess.com/wp-content/uploads/2018/04/MTS_SPM.pdf Photoresist Stripers (PDF)]
 +
 +
 +
* [https://www.youtube.com/watch?v=070--bHL3pI Quick intro to Photoresist Stripers (Video)]
 +
* [https://www.youtube.com/watch?v=gwtsXK6Fil8 Photoresist Stripers (Video)]
 
|}
 
|}
  
  
−
;Step 2.5 Use the Silicon Wafer Ctrl 2.4 in the Wafer Washer to clean the wafer of photoresist residues and obtain Silicon Wafer Ctrl 2.5.
+
;Step 2.6 Use the [[Silicon Wafer|silicon wafer Ctrl 2.5]] in the [[Wafer Washer|wafer washer]] to clean the wafer of photoresist residues and obtain [[Silicon Wafer|silicon wafer Ctrl 2.6]].
 
===Wafer Washer===
 
===Wafer Washer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 362: Line 556:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.5|32px|alt=Silicon Wafer Ctrl 2.5|[[Silicon Wafer Ctrl 2.5|Silicon Wafer Ctrl 2.5]]]] [[Silicon Wafer Ctrl 2.5|Silicon Wafer Ctrl 2.5]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.6]] [[Silicon Wafer|Silicon Wafer Ctrl 2.6]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 2.4]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.5]] [[Silicon Wafer|Silicon Wafer Ctrl 2.5]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=1|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 2.4|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.4}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 2.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.5}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 2.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.5}}
+
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 2.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.6}}
 
|type=wafer-washer|shapeless=false}}
 
|type=wafer-washer|shapeless=false}}
 +
|
 +
* [https://easycleanway.com/how-to-clean-silicon-wafer/ Silicon Wafer Cleaning (Website)]
 +
* [https://www.universitywafer.com/how-to-clean-silicon-wafers.html Silicon Wafer Cleaning (Website)]
 +
 +
 +
* [https://www.youtube.com/watch?v=11sJQaFCGHE Quick intro to Silicon Wafer Cleaning (Video)]
 +
* [https://www.youtube.com/watch?v=uVwMf6agSkw Silicon Wafer Cleaning (Video)]
 +
 +
 +
* [https://www.sciencedirect.com/science/article/pii/B9780323510844000010 Handbook of Silicon Wafer Cleaning Technology (Third Edition) (Book PDF)]
 +
* [https://www.static-contents.youth4work.com/y4w/fc469004-19c4-4401-81ce-90d5c073564d.pdf Silicon Wafer Cleaning (Paper PDF)]
 
|}
 
|}
  
  
−
;Step 2.6 Use the Silicon Wafer Ctrl 2.5, a bag of phosphorus and Mask (Ctrl 2nd well) in the Ion Bean to seed the 2nd well with ions and obtain Silicon Wafer Ctrl 2.6.
+
;Step 2.7 Use the [[Silicon Wafer|silicon wafer Ctrl 2.6]] and a [[Bag (Phosphorus)|bag of phosphorus]] in the [[Ion Bean]] to seed the 2nd well with ions and obtain [[Silicon Wafer|silicon eafer Ctrl 2.7]].
 
===Ion Implanter===
 
===Ion Implanter===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 384: Line 590:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.6|32px|alt=Silicon Wafer Ctrl 2.6|[[Silicon Wafer Ctrl 2.6|Silicon Wafer Ctrl 2.6]]]] [[Silicon Wafer Ctrl 2.6|Silicon Wafer Ctrl 2.6]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.7]] [[Silicon Wafer|Silicon Wafer Ctrl 2.7]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 2.5]]
+
* [[Image:Vessel_bag.png|link=Bag (Phosphorus)|32px|alt=Bag (Phosphorus)]] [[Bag (Phosphorus)]]
−
* [[Bag (Phosphorus)]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.6]] [[Silicon Wafer|Silicon Wafer Ctrl 2.6]]
−
* [[Mask (Ctrl 2nd well)]]
 
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Bag (Phosphorus)|image=Vessel_bag.png|link=Bag (Phosphorus)|amount=1}}
 
{{Inventory/Slot|index=1|title=Bag (Phosphorus)|image=Vessel_bag.png|link=Bag (Phosphorus)|amount=1}}
−
{{Inventory/Slot|index=2|title=mask1|image=Itemmask.png|link=mask1}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.6}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.5}}
+
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 2.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.7}}
−
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 2.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.6}}
 
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
|type=ion-implanter|shapeless=false}}
 
|type=ion-implanter|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Doping_(semiconductor) Doping (Wikipedia)]
 +
 +
 +
* [https://www.youtube.com/watch?v=LDUeNI1p5fQ Doping (Video)]
 +
* [https://www.youtube.com/watch?v=5ZNeDxfgYAE P-Type and N-Type Semiconductors(Video)]
 +
* [https://www.youtube.com/watch?v=2fizX2B3sUA Doping Lecture (Video)]
 
|}
 
|}
  
  
−
;Step 2.7 Use the Silicon Wafer Ctrl 2.6 and an Oxygen Cartridge in the O2 furnace to grow a SiO2 layer in the wafer and obtain Wafer Ctrl 2.7.
+
; Step 2.8 The implantation process disrupted the silicon crystal structure. To smooth and repair the silicon crystal, take the [[Silicon Wafer|silicon wafer Ctrl 2.7]] to the [[Annealing Furnace|annealing furnace]] with an [[Cartridge (Argon)|argon cartridge]] and obtain [[Silicon Wafer|silicon wafer Ctrl 2.8]].  
−
===O2 Furnace===
+
===Annealing Furnace===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
 
|-
 
|-
Line 409: Line 621:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.7|32px|alt=Silicon Wafer Ctrl 2.7|[[Silicon Wafer Ctrl 2.7|Silicon Wafer Ctrl 2.7]]]] [[Silicon Wafer Ctrl 2.7|Silicon Wafer Ctrl 2.7]]
+
* [[Image:Silicon wafer blue.png|link=v|32px|alt=Silicon Wafer Ctrl 2.8]] [[Silicon Wafer|Silicon Wafer Ctrl 2.8]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 2.6]]
+
* [[Image:Vessel_cartridge.png|link=Cartridge (Argon)|32px|alt=Cartridge (Argon)]] [[Cartridge (Argon)]]
−
* [[Cartridge (Oxygen)]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.7]] [[Silicon Wafer|Silicon Wafer Ctrl 2.7]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
−
{{Inventory/Slot|index=1|title=Cartridge (Oxygen)|image=Vessel_cartridge.png|link=Cartridge (Oxygen)|amount=1}}
+
{{Inventory/Slot|index=1|title=Cartridge (Argon)|image=Vessel_cartridge.png|link=Cartridge (Argon)|amount=1}}
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.6}}
+
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.7|image=Silicon wafer blue.png|link=Silicon Wafer}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.7}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.8|image=Silicon wafer blue.png|link=Silicon Wafer}}
 
|type=o2_furnace|shapeless=false}}
 
|type=o2_furnace|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Annealing_(materials_science) Annealing (Wikipedia)]
 
|}
 
|}
  
  
−
;Step 2.8 Use the Silicon Wafer Ctrl 2.7 in the scanning electron microscope to check if the 2st well was correctly created and obtain Wafer Ctrl 2.8.
+
;Step 2.9 Use the [[Silicon Wafer|silicon wafer Ctrl 2.8]] and an [[Cartridge (Oxygen)|oxygen cartridge]] in the [[O2 Furnace|O2 furnace]] to grow a SiO2 layer in the wafer and obtain [[Silicon Wafer|silicon wafer Ctrl 2.9]].
 
===O2 Furnace===
 
===O2 Furnace===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 431: Line 646:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 2.8|32px|alt=Silicon Wafer Ctrl 2.8|[[Silicon Wafer Ctrl 2.8|Silicon Wafer Ctrl 2.8]]]] [[Silicon Wafer Ctrl 2.8|Silicon Wafer Ctrl 2.8]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.9]] [[Silicon Wafer|Silicon Wafer Ctrl 2.9]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 2.7]]
+
* [[Image:Vessel_cartridge.png|link=Cartridge (Oxygen)|32px|alt=Cartridge (Oxygen)]] [[Cartridge (Oxygen)]]
 +
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.8]] [[Silicon Wafer|Silicon Wafer Ctrl 2.8]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=2|title=Fuel|image=Fuel.png|link=List of Fuels}}
−
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.7|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.7}}
+
{{Inventory/Slot|index=1|title=Cartridge (Oxygen)|image=Vessel_cartridge.png|link=Cartridge (Oxygen)|amount=1}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.8|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.8}}
+
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 2.8|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.8}}
 +
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.9|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.9}}
 
|type=o2_furnace|shapeless=false}}
 
|type=o2_furnace|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Thermal_oxidation Thermal Oxydation (Wikipedia)]
 +
 +
 +
* [https://www.youtube.com/watch?v=1Lh4EfEsELY Thermal Oxydation (Video)]
 +
* [https://www.youtube.com/watch?v=gOdVI8wuWUs Thermal Oxidation Lecture (Video)]
 +
|}
 +
 +
 +
;Step 2.10 Use the [[Silicon Wafer Ctrl 2.9|silicon wafer Ctrl 2.9]] in the [[Scanning Electron Microscope|scanning electron microscope]] to check if the 2st well was correctly created and obtain [[Silicon Wafer|silicon wafer Ctrl 2.10]].
 +
===Scanning Electron Microscope===
 +
{| class="wikitable sortable collapsible"
 +
|-
 +
! Outputs
 +
! Components
 +
! Recipe
 +
! Do you want to know more?
 +
|-
 +
|
 +
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.10]] [[Silicon Wafer|Silicon Wafer Ctrl 2.10]]
 +
|
 +
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.9]] [[Silicon Wafer|Silicon Wafer Ctrl 2.9]]
 +
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 +
{{Inventory/Slot|index=1|title=Silicon Wafer Ctrl 2.9|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.9}}
 +
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 2.10|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.10}}
 +
|type=scanning-electron-microscope|shapeless=false}}
 +
|
 
|}
 
|}
  
Line 449: Line 695:
  
  
−
;Step 3.0 Get the Mask (Ctrl Metal) from the [[Mask Writer]]..
+
;Step 3.0 Get the [[Mask (Ctrl Metal)]] from the [[Mask Writer|mask writer]].
 
===Mask Writer===
 
===Mask Writer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 456: Line 702:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:Itemmask.png|link=Mask (Ctrl Metal)|32px|alt=Mask (Ctrl Metal)|[[Mask (Ctrl Metal)|Mask (Ctrl Metal)]]]] [[Mask (Ctrl Metal)|Mask (Ctrl Metal)]]
+
* [[Image:Itemmask.png|link=Mask (Ctrl Metal)|32px|alt=Mask (Ctrl Metal)]] [[Mask (Ctrl Metal)|Mask (Ctrl Metal)]]
 
|  
 
|  
−
* [[Aluminum Nugget|Aluminum Nugget]]
+
* [[Image:Aluminum_nugget.png|link=Aluminum Nugget|32px|alt=Aluminum Nugget]] [[Aluminum Nugget]]
 
| {{Inventory|{{Inventory/Slot|index=12|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
| {{Inventory|{{Inventory/Slot|index=12|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
{{Inventory/Slot|index=1|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
 
{{Inventory/Slot|index=1|title=Aluminum Nugget|image=Aluminum_nugget.png|link=Aluminum Nugget}}
Line 482: Line 729:
 
{{Inventory/Slot|index=25|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=25|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=26|title=Mask (Ctrl Metal)|image=Itemmask.png|link=Mask (Ctrl Metal)}}|type=machining-mill|shapeless=false}}
 
{{Inventory/Slot|index=26|title=Mask (Ctrl Metal)|image=Itemmask.png|link=Mask (Ctrl Metal)}}|type=machining-mill|shapeless=false}}
 +
|
 +
*[https://en.wikipedia.org/wiki/Photomask Photomask (Wikipedia)]
 +
 +
 +
*[https://www.youtube.com/watch?v=Pt9NEnWmyMo Photomask (Video)]
 
|}
 
|}
  
  
−
;Step 3.1 Use the Silicon Wafer Ctrl 2.8, Mask (Ctrl Metal) and a Vial (Positive Photoresist) in the [[Chemical Solution Deposition]] machine to obtain the Silicon Wafer Ctrl 3.1.
+
;Step 3.1 Use the [[Silicon Wafer|silicon wafer Ctrl 2.9]], [[Mask (Ctrl Metal)]] and a [[Vial (Positive Photoresist)| positive photoresist vial]] in the [[Chemical Solution Deposition|chemical solution deposition]] machine to obtain the [[Silicon Wafer|silicon wafer Ctrl 3.1]].
−
===Contact Printer===
+
===Chemical Solution Deposition===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
 
|-
 
|-
Line 492: Line 744:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.1|32px|alt=Silicon Wafer Ctrl 3.1]|[[Silicon Wafer Ctrl 3.1|Silicon Wafer Ctrl 3.1]]]] [[Silicon Wafer Ctrl 3.1|Silicon Wafer Ctrl 3.1]]
+
* [[Image:Waferitem red.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.1]] [[Silicon Wafer|Silicon Wafer Ctrl 3.1]]
 
|  
 
|  
−
* [[Vial (Positive Photoresist)]]
+
* [[Image:Vessel_vial.png|link=Vial (Positive Photoresist)|32px|alt=Vial (Positive Photoresist)]] [[Vial (Positive Photoresist)]]
−
* [[Silicon Wafer Ctrl 2.8]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 2.9]] [[Silicon Wafer|Silicon Wafer Ctrl 2.9]]
 
| {{Inventory|
 
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
 
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist)|image=Vessel_vial.png|link=Vial (Positive Photoresist)}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 2.8|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 2.8}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 2.9|image=Silicon wafer blue.png|link=Silicon Wafer}}
−
{{Inventory/Slot|index=5|title=Silicon Wafer Ctrl 3.1|image=Waferitem red.png|link=Silicon Wafer Ctrl 3.1}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 3.1|image=Waferitem red.png|link=Silicon Wafer}}
−
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
+
|type=chemical-solution-deposition|shapeless=false}}
−
|type=contact-printer|shapeless=false}}
+
|
 +
* [https://en.wikipedia.org/wiki/Photoresist Photoresist (Wikipedia)]
 +
* [https://en.wikipedia.org/wiki/Spin_coating Spin Coating (Wikipedia)]
 +
* [https://web.mit.edu/scholvin/www/nt245/Documents/resists.AN.spin_coating_photoresist.pdf Spin Coating of Photoresists (MIT)]
 
|}
 
|}
  
  
−
;Step 3.2 Use the Silicon Wafer Ctrl 3.1, Mask (Ctrl Metal), Vial (Positive Photoresist) and a UV bulb in the [[Contact Printer]] to imprint the etching pattern and obtain the Silicon Wafer Ctrl 3.2.
+
;Step 3.2 Use the [[Silicon Wafer|silicon wafer Ctrl 3.1]], [[Mask (Ctrl Metal)]], [[Vial (Positive Photoresist)|positive photoresist vial]] and a UV bulb in the [[Contact Printer]] to imprint the etching pattern and obtain the [[Silicon Wafer|silicon wafer Ctrl 3.2]]. For positive photoresist, the contact printer light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.  
 
===Contact Printer===
 
===Contact Printer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 514: Line 771:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.2|32px|alt=Silicon Wafer Ctrl 3.2]|[[Silicon Wafer Ctrl 3.2|Silicon Wafer Ctrl 3.2]]]] [[Silicon Wafer Ctrl 3.2|Silicon Wafer Ctrl 3.2]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.2]] [[Silicon Wafer|Silicon Wafer Ctrl 3.2]]
 
|  
 
|  
−
* [[365 nm UV Bulbs]]
+
* [[Image:365_nm_uv_bulbs.png|link=365 nm UV Bulbs|32px|alt=365 nm UV Bulbs]] [[365 nm UV Bulbs]]
−
* [[Mask (Ctrl Metal)]]
+
* [[Image:Itemmask.png|link=Mask (Ctrl Metal)|32px|alt=Mask (Ctrl Metal)]] [[Mask (Ctrl Metal)]]
−
* [[Silicon Wafer Ctrl 3.1]]
+
* [[Image:Waferitem red.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.1]] [[Silicon Wafer|Silicon Wafer Ctrl 3.1]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=365 nm UV Bulbs|image=365_nm_uv_bulbs.png|link=365 nm UV Bulbs}}
 
{{Inventory/Slot|index=0|title=365 nm UV Bulbs|image=365_nm_uv_bulbs.png|link=365 nm UV Bulbs}}
Line 528: Line 786:
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
|type=contact-printer|shapeless=false}}
 
|type=contact-printer|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photolithography Photolitography (Wikipedia)]
 +
 +
 +
* [https://www.youtube.com/watch?v=emUoFq5nRZM Quick intro to Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=udXHWVejDj0 Photolitography (Video)]
 
|}
 
|}
  
  
−
;Step 3.3 Use the Silicon Wafer Ctrl 3.2 and Vial (Ammonium Fluoride Etchant) in the [[Chemical Processor]] to etch the metal contacts and obtain Silicon Wafer Ctrl 3.3.
+
;Step 3.3 Use the [[Silicon Wafer|silicon wafer Ctrl 3.2]] and [[Vial (Positive Photoresist Developer)|positive photoresist developer vial]] in the [[Chemical Processor|chemical processor]] to remove the unexposed photoresist and obtain [[Silicon Wafer|silicon wafer Ctrl 3.3]].
 
===Chemical Processor===
 
===Chemical Processor===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 538: Line 802:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.3|32px|alt=Silicon Wafer Ctrl 3.3|[[Silicon Wafer Ctrl 3.3|Silicon Wafer Ctrl 3.3]]]] [[Silicon Wafer Ctrl 3.3|Silicon Wafer Ctrl 3.3]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.3]] [[Silicon Wafer|Silicon Wafer Ctrl 3.3]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 3.2]]
+
* [[Image:Vessel_vial.png|link=Vial (Positive Photoresist Developer)|32px|alt=Vial (Positive Photoresist Developer)]] [[Vial (Positive Photoresist Developer)]]
−
* [[Vial (Ammonium Fluoride Etchant)]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.2]] [[Silicon Wafer|Silicon Wafer Ctrl 3.2]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 3.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.2}}
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 3.2|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.2}}
−
{{Inventory/Slot|index=1|title=Vial (Ammonium Fluoride Etchant)|image=Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|amount=1}}
+
{{Inventory/Slot|index=1|title=Vial (Positive Photoresist Developer)|image=Vessel_vial.png|link=Vial (Positive Photoresist Developer)|amount=1}}
 
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 3.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.3}}
 
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 3.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.3}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
* [https://en.wikipedia.org/wiki/Photoresist Photoresist (Wikipedia)]
 +
* [https://www.microchemicals.com/dokumente/application_notes/development_photoresist.pdf Photoresist Developers (Pdf)]
 +
 +
 +
* [https://www.youtube.com/watch?v=emUoFq5nRZM Quick intro to Photolitography (Video)]
 +
* [https://www.youtube.com/watch?v=-n0UKFgrLbo Photoresist Developer (Video)]
 
|}
 
|}
  
  
−
;Step 3.4 Use the Silicon Wafer Ctrl 3.3 and Vial (Photoresist Stripper SPM) in the Chemical Processor to remove the photoresist and obtain Silicon Wafer Ctrl 3.4.
+
;Step 3.4 Use the [[Silicon Wafer|silicon wafer Ctrl 3.3]] and [[Vial (Ammonium Fluoride Etchant)|ammonium fluoride etchant vial]] in the [[Chemical Processor|chemical processor]] to etch the metal contacts and obtain [[Silicon Wafer|silicon wafer Ctrl 3.4]].
 
===Chemical Processor===
 
===Chemical Processor===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 561: Line 833:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.4|32px|alt=Silicon Wafer Ctrl 3.4|[[Silicon Wafer Ctrl 3.4|Silicon Wafer Ctrl 3.4]]]] [[Silicon Wafer Ctrl 3.4|Silicon Wafer Ctrl 3.4]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.4]] [[Silicon Wafer|Silicon Wafer Ctrl 3.4]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 3.3]]
+
* [[Image:Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|32px|alt=Vial (Ammonium Fluoride Etchant)]] [[Vial (Ammonium Fluoride Etchant)]]
−
* [[Vial (Photoresist Stripper SPM)]]
+
* [[Image:Waferitem red pattern.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.3]] [[Silicon Wafer|Silicon Wafer Ctrl 3.3]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 3.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.3}}
 
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 3.3|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.3}}
 +
{{Inventory/Slot|index=1|title=Vial (Ammonium Fluoride Etchant)|image=Vessel_vial.png|link=Vial (Ammonium Fluoride Etchant)|amount=1}}
 +
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 3.4|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.4}}
 +
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 +
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 +
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 +
*[https://en.wikipedia.org/wiki/Etching_(microfabrication) Etching (Wikipedia)]
 +
*[https://www.hitachi-hightech.com/global/en/knowledge/semiconductor/room/manufacturing/etch.html What is a Etch system? (Website)]
 +
 +
 +
*[https://www.youtube.com/watch?v=2O1TyJGXuWY Quick intro to Etching (Video)]
 +
*[https://www.youtube.com/watch?v=po-nlRUQkbI&t=140s Etching (Video)]
 +
|}
 +
 +
 +
;Step 3.5 Use the [[Silicon Wafer|silicon wafer Ctrl 3.4]] and [[Vial (Photoresist Stripper SPM)|photoresist stripper SPM vial)]] in the [[Chemical Processor|chemical processor]] to remove the exposed photoresist and obtain [[Silicon Wafer|silicon wafer Ctrl 3.5]].
 +
===Chemical Processor===
 +
{| class="wikitable sortable collapsible"
 +
|-
 +
! Outputs
 +
! Components
 +
! Recipe
 +
! Do you want to know more?
 +
|-
 +
|
 +
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.5]] [[Silicon Wafer|Silicon Wafer Ctrl 3.5]]
 +
|
 +
* [[Image:Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|32px|alt=Vial (Photoresist Stripper SPM)]] [[Vial (Photoresist Stripper SPM)]]
 +
* [[Image:Waferitem red pattern.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.4]] [[Silicon Wafer|Silicon Wafer Ctrl 3.4]]
 +
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Silicon Wafer Ctrl 3.4|image=Waferitem red pattern.png|link=Silicon Wafer Ctrl 3.4}}
 
{{Inventory/Slot|index=1|title=Vial (Photoresist Stripper SPM)|image=Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|amount=1}}
 
{{Inventory/Slot|index=1|title=Vial (Photoresist Stripper SPM)|image=Vessel_vial.png|link=Vial (Photoresist Stripper SPM)|amount=1}}
−
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 3.4|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.4}}
+
{{Inventory/Slot|index=8|title=Silicon Wafer Ctrl 3.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.5}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=5|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=6|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 
{{Inventory/Slot|index=7|title=Fuel|image=Fuel.png|link=List of Fuels}}|type=chemical-processor|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 3.5 Use the Silicon Wafer Ctrl 3.4 in the wafer washer to clean the wafer of photoresist residues and obtain Silicon Wafer Ctrl 3.5.
+
;Step 3.6 Use the [[Silicon Wafer Ctrl 3.5]] in the [[Wafer Washer|wafer washer]] to clean the wafer of photoresist residues and obtain [[Silicon Wafer|silicon wafer Ctrl 3.6]].
 
===Wafer Washer===
 
===Wafer Washer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 584: Line 889:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.5|32px|alt=Silicon Wafer Ctrl 3.5|[[Silicon Wafer Ctrl 3.5|Silicon Wafer Ctrl 3.5]]]] [[Silicon Wafer Ctrl 3.5|Silicon Wafer Ctrl 3.5]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.6]] [[Silicon Wafer|Silicon Wafer Ctrl 3.6]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 3.4]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.5]] [[Silicon Wafer|Silicon Wafer Ctrl 3.5]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=1|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 3.4|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.4}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 3.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.5}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 3.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.5}}
+
{{Inventory/Slot|index=4|title=Silicon Wafer Ctrl 3.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.6}}
 
|type=wafer-washer|shapeless=false}}
 
|type=wafer-washer|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 3.6 Use the Silicon Wafer Ctrl 3.5 and a copper nugget for Atomic Layer Deposition to create a copper layer in the wafer and obtain Silicon Wafer Ctrl 3.6.
+
;Step 3.7 Use the [[Silicon Wafer|silicon wafer Ctrl 3.6]] and a [[Copper Nugget|copper nugget]] for [[Atomic Layer Deposition|atomic layer deposition]] to create a copper layer in the wafer and obtain [[Silicon Wafer|silicon wafer Ctrl 3.7]].
 
===Atomic Layer Deposition===
 
===Atomic Layer Deposition===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 606: Line 913:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Silicon Wafer Ctrl 3.6|32px|alt=Silicon Wafer Ctrl 3.6|[[Silicon Wafer Ctrl 3.6|Silicon Wafer Ctrl 3.6]]]] [[Silicon Wafer Ctrl 3.6|Silicon Wafer Ctrl 3.6]]
+
* [[Image:Waferitem orange.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.7]] [[Silicon Wafer|Silicon Wafer Ctrl 3.7]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 3.5]]
+
* [[Image:Copper_nugget.png|link=Copper Nugget|32px|alt=Copper Nugget]] [[Copper Nugget]]
−
* [[Copper Nugget]]
+
* [[Image:Silicon wafer blue.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.6]] [[Silicon Wafer|Silicon Wafer Ctrl 3.6]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=1|title= Copper Nugget|image= Copper_nugget.png|link=Copper Nugget|amount=1}}
 
{{Inventory/Slot|index=1|title= Copper Nugget|image= Copper_nugget.png|link=Copper Nugget|amount=1}}
−
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 3.5|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.5}}
+
{{Inventory/Slot|index=2|title=Silicon Wafer Ctrl 3.6|image=Silicon wafer blue.png|link=Silicon Wafer Ctrl 3.6}}
−
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 3.6|image=Waferitem orange.png|link=Silicon Wafer Ctrl 3.6}}
+
{{Inventory/Slot|index=3|title=Silicon Wafer Ctrl 3.7|image=Waferitem orange.png|link=Silicon Wafer Ctrl 3.7}}
 
|type=atomic-layer-deposition}}
 
|type=atomic-layer-deposition}}
 +
|
 
|}
 
|}
  
  
−
;Step 3.7 Use the Silicon Wafer Ctrl 3.6 in the chemical phisical polisher to strip the excess of metal and obtain a Unwashed Controller Die Wafer.
+
;Step 3.8 Use the [[Silicon Wafer|silicon wafer Ctrl 3.7]] in the [[Chemical Mechanical Polisher|chemical mechanical polisher]] to strip the excess of metal and obtain a [[Unwashed Controller Die Wafer|unwashed controller die wafer]].
 
===Chemical Mechanical Polisher===
 
===Chemical Mechanical Polisher===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 628: Line 937:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Unwashed Controller Die Wafer|32px|alt=Unwashed Controller Die Wafer|[[Unwashed Controller Die Wafer|Unwashed Controller Die Wafer]]]] [[Unwashed Controller Die Wafer|Unwashed Controller Die Wafer]]
+
* [[Image:Finished wafer.png|link=Unwashed Controller Die Wafer|32px|alt=Unwashed Controller Die Wafer]] [[Unwashed Controller Die Wafer]]
 
|  
 
|  
−
* [[Silicon Wafer Ctrl 3.6]]
+
* [[Image:Waferitem orange.png|link=Silicon Wafer|32px|alt=Silicon Wafer Ctrl 3.7]] [[Silicon Wafer|Silicon Wafer Ctrl 3.7]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
−
{{Inventory/Slot|index=1|title=Silicon Wafer Ctrl 3.6|image=Waferitem orange.png|link=Silicon Wafer Ctrl 3.6}}
+
{{Inventory/Slot|index=1|title=Silicon Wafer Ctrl 3.7|image=Waferitem orange.png|link=Silicon Wafer Ctrl 3.7}}
 
{{Inventory/Slot|index=2|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=2|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=4|title=Unwashed Controller Die Wafer|image=Finished wafer.png|link=Unwashed Controller Die Wafer}}
 
{{Inventory/Slot|index=4|title=Unwashed Controller Die Wafer|image=Finished wafer.png|link=Unwashed Controller Die Wafer}}
 
|type=chemical-mechanical-polisher|shapeless=false}}
 
|type=chemical-mechanical-polisher|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 3.8 Use the Unwashed Controller Die Wafer in the Wafer Washer to clean the wafer of photoresist residues and obtain the Controller Die Wafer.
+
;Step 3.9 Use the [[Unwashed Controller Die Wafer|unwashed controller die wafer]] in the [[Wafer Washer|wafer washer]] to clean the wafer of photoresist residues and obtain the [[Unchecked Controller Die Wafer|unchecked controller die wafer]].
 
===Wafer Washer===
 
===Wafer Washer===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 650: Line 961:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:silicon_wafer.png|link=Controller Die Wafer|32px|alt=Controller Die Wafer|[[Controller Die Wafer|Controller Die Wafer]]]] [[Controller Die Wafer|Controller Die Wafer]]
+
* [[Image:Finished wafer.png|link=Controller Die Wafer|32px|alt=Controller Die Wafer]] [[Unchecked Controller Die Wafer|Controller Die Wafer]]
 
|  
 
|  
−
* [[Unwashed Controller Die Wafer]]
+
* [[Image:Finished wafer.png|link=Unwashed Controller Die Wafer|32px|alt=Unwashed Controller Die Wafer]] [[Unwashed Controller Die Wafer]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
Line 660: Line 972:
 
{{Inventory/Slot|index=2|title=Unwashed Controller Die Wafer|image=Finished wafer.png|link=Unwashed Controller Die Wafer}}
 
{{Inventory/Slot|index=2|title=Unwashed Controller Die Wafer|image=Finished wafer.png|link=Unwashed Controller Die Wafer}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
 
{{Inventory/Slot|index=3|title=Water Bucket|image=Bucket_water.png|link=http://minecraft.gamepedia.com/Water%20Bucket}}
−
{{Inventory/Slot|index=4|title=Controller Die Wafer|image=Finished wafer.png|link=Controller Die Wafer}}
+
{{Inventory/Slot|index=4|title=Unchecked Controller Die Wafer|image=Finished wafer.png|link=Unchecked Controller Die Wafer}}
 
|type=wafer-washer|shapeless=false}}
 
|type=wafer-washer|shapeless=false}}
 +
|
 +
|}
 +
 +
 +
;Step 3.10 Use the [[Unchecked Controller Die Wafer|unchecked controller die wafer]] in the [[Scanning Electron Microscope|scanning electron microscope]] to check it for defects.
 +
===Scanning Electron Microscope===
 +
{| class="wikitable sortable collapsible"
 +
|-
 +
! Outputs
 +
! Components
 +
! Recipe
 +
! Do you want to know more?
 +
|-
 +
|
 +
* [[Image:Finished wafer.png|link=Controller Die Wafer|32px|alt=Unchecked Controller Die Wafer]] [[Controller Die Wafer|Unchecked Controller Die Wafer]]
 +
|
 +
* [[Image:Finished wafer.png|link=Unchecked Controller Die Wafer|32px|alt=Unchecked Controller Die Wafer]] [[Controller Die Wafer|Unchecked Controller Die Wafer]]
 +
| {{Inventory|
 +
{{Inventory/Slot|index=0|title=Fuel|image=Fuel.png|link=List of Fuels}}
 +
{{Inventory/Slot|index=1|title=Unchecked Controller Die Wafer|image=Finished wafer.png|link=Controller Die Wafer}}
 +
{{Inventory/Slot|index=2|title=Controller Die Wafer|image=Finished wafer.png|link=Controller Die Wafer}}
 +
|type=scanning-electron-microscope|shapeless=false}}
 +
|
 
|}
 
|}
  
  
−
;Step 3.9 Use the Controller Die Wafer in the Stone Cutter to obtain the [[Controller Die]].
+
;Step 3.11 Use the [[Controller Die Wafer|controller die wafer]] in the [[Stone Cutter|stone cutter]] to obtain the [[Controller Die|controller die]].
 
===Stonecutter===
 
===Stonecutter===
 
{| class="wikitable sortable collapsible"
 
{| class="wikitable sortable collapsible"
Line 672: Line 1,007:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:Controller die.png|link=Controller Die|32px|alt=Controller Die|[[Controller Die|Controller Die]]]] [[Controller Die|Controller Die]]
+
* [[Image:Controller die.png|link=Controller Die|32px|alt=Controller Die]] [[Controller Die]]
 
|  
 
|  
−
* [[Image:Finished wafer.png|link=Controller Die Wafer|32px|alt=Controller Die Wafer|[[Controller Die Wafer|Controller Die Wafer]]]] [[Controller Die Wafer|Controller Die Wafer]]
+
* [[Image:Finished wafer.png|link=Controller Die Wafer|32px|alt=Controller Die Wafer]] [[Controller Die Wafer]]
 
|{{Inventory|
 
|{{Inventory|
 
{{Inventory/Slot|index=0|title=[Controller Die Wafer]  Controller Die Wafer|image=Finished wafer.png|link=Controller Die Wafer}}
 
{{Inventory/Slot|index=0|title=[Controller Die Wafer]  Controller Die Wafer|image=Finished wafer.png|link=Controller Die Wafer}}
 
{{Inventory/Slot|index=1|title=Controller Die|image=controller_die.png|link=Controller Die|amount=16}}
 
{{Inventory/Slot|index=1|title=Controller Die|image=controller_die.png|link=Controller Die|amount=16}}
 
|type=stone-cutter|shapeless=false}}
 
|type=stone-cutter|shapeless=false}}
 +
|
 
|}
 
|}
  
Line 687: Line 1,024:
  
  
−
;Create the controller chip - Use a Controller Die, the Enclosure and the Interconnection Array in the Crafting Table to obtain the [[Controller Chip|controller chip]].  
+
;Create the [[Controller Chip|controller chip]] - Use a [[Controller Die|controller die]], the [[Enclosure|enclosure]] and the [[Interconnection Array|interconnection array]] in the [[Crafting Table|crafting table]] to obtain the [[Controller Chip|controller chip]].  
 
===Crafting Table===
 
===Crafting Table===
  
Line 695: Line 1,032:
 
! Components
 
! Components
 
! Recipe
 
! Recipe
 +
! Do you want to know more?
 
|-
 
|-
 
|  
 
|  
−
* [[Image:controller_chip.png|link=Controller Chip|32px|alt=Controller Chip|[[Controller Chip|Controller Chip]]]] [[Controller Chip|Controller Chip]]
+
* [[Image:controller_chip.png|link=Controller Chip|32px|alt=Controller Chip]] [[Controller Chip]]
 
|  
 
|  
−
* [[Enclosure]]
+
* [[Image:Enclosure.png|link=Enclosure|32px|alt=v]] [[Enclosure]]
−
* [[Controller Die]]
+
* [[Image:controller_die.png|link=Controller Die|32px|alt=Controller Die]] [[Controller Die]]
−
* [[Interconnection Array]]
+
* [[Image:interconnection_array.png|link=Interconnection Array|32px|alt=v]] [[Interconnection Array]]
 
| {{Inventory|
 
| {{Inventory|
 
{{Inventory/Slot|index=1|title=Enclosure|image=Enclosure.png|link=Enclosure}}
 
{{Inventory/Slot|index=1|title=Enclosure|image=Enclosure.png|link=Enclosure}}
Line 708: Line 1,046:
 
{{Inventory/Slot|index=9|title=Controller Chip|image=controller_chip.png|link=Controller Chip}}
 
{{Inventory/Slot|index=9|title=Controller Chip|image=controller_chip.png|link=Controller Chip}}
 
|type=crafting-table|shapeless=false}}
 
|type=crafting-table|shapeless=false}}
 +
|
 
|}
 
|}
  
Line 727: Line 1,066:
  
 
[https://gacbe.ac.in/images/E%20books/Fundamentals%20of%20Semiconductor%20Manufacturing%20and%20Process%20Control%20G.%20May%20C.%20Spanos.pdf Fundamentals of semiconductor manufacturing and process control from Gary S. May and Costas J. Spanos (Book PDF)]
 
[https://gacbe.ac.in/images/E%20books/Fundamentals%20of%20Semiconductor%20Manufacturing%20and%20Process%20Control%20G.%20May%20C.%20Spanos.pdf Fundamentals of semiconductor manufacturing and process control from Gary S. May and Costas J. Spanos (Book PDF)]
 +
 +
[https://www.sciencedirect.com/science/article/pii/B9780128035818104333 Photolitography (Book PDF)]
 +
 +
[https://www.sciencedirect.com/science/article/pii/B9780323510844000010 Handbook of Silicon Wafer Cleaning Technology (Third Edition) (Book PDF)]
 +
 +
[https://www.static-contents.youth4work.com/y4w/fc469004-19c4-4401-81ce-90d5c073564d.pdf Silicon Wafer Cleaning (Paper PDF)]
 +
 +
  
  
Line 733: Line 1,080:
  
 
[https://semi.org/en/semi-university SEMI University]
 
[https://semi.org/en/semi-university SEMI University]
 +
 +
  
  

Latest revision as of 03:40, 6 July 2024

Description

The idea behind the microcontroller unit is its role as a cost-effective and energy-efficient processor designed for specific applications. Over the past few years, some of these devices have significantly increased in capability, leading to a blurring of the traditional definition of a microcontroller. Nowadays, controller chips are integrated into various devices such as Metal Detectors, Wearables, SSDs and CPUs.

Recipes

The starting point for the controller chip is a n-type Silicon Wafer with a SiO2 layer.

Step 1.0 Get the Mask (Ctrl 1st well) from the Mask Writer.

Mask Writer

Outputs Components Recipe Do you want to know more?
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Water Bucket
Mask (Ctrl 1st Mask)



Step 1.1 Apply a positive photoresist vial) to the silicon safer (N-type) SiO2 in the Chemical Solution Deposition machine and obtain the silicon wafer Ctrl 1.1.

Chemical Solution Deposition

Outputs Components Recipe Do you want to know more?
Fuel
Vial (Positive Photoresist)
Silicon Wafer (N-type) SiO2
Silicon Wafer Ctrl 1.1



Step 1.2 Use the Silicon Wafer Ctrl 1.1, Mask (Ctrl 1st well) and a UV bulb in the Contact Printer to imprint the pattern and obtain the Silicon Wafer Ctrl 1.2. For positive photoresist, the contact printer light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.

Contact Printer

Outputs Components Recipe Do you want to know more?
365 nm UV Bulbs
Mask (Ctrl 1st well)
Silicon Wafer Ctrl 1.1
Silicon Wafer Ctrl 1.2
Fuel




Step 1.3 Use the silicon wafer Ctrl 1.2 and positive photoresist developer vial in the Chemical Processor to remove the unexposed photoresist and obtain silicon wafer Ctrl 1.3.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 1.2
Vial (Positive Photoresist Developer)
1
Silicon Wafer Ctrl 1.3
Water Bucket
Water Bucket
Fuel



Step 1.4 Use the silicon wafer Ctrl 1.3 and ammonium fluoride etchant vial in the Chemical Processor to etch the 1st wells and obtain silicon wafer Ctrl 1.4.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 1.3
Vial (Ammonium Fluoride Etchant)
1
Silicon Wafer Ctrl 1.4
Water Bucket
Water Bucket
Fuel



Step 1.5 Use the silicon wafer Ctrl 1.4 and a photoresist stripper SPM vial in the Chemical Processor to remove the exposed photoresist and obtain silicon wafer Ctrl 1.5.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 1.4
Vial (Photoresist Stripper SPM)
1
Silicon Wafer Ctrl 1.5
Water Bucket
Water Bucket
Fuel



Step 1.6 Use the silicon wafer Ctrl 1.5 in the wafer washer to clean the wafer of photoresist residues and obtain silicon wafer Ctrl 1.6.

Wafer Washer

Outputs Components Recipe Do you want to know more?
Fuel
Water Bucket
Silicon Wafer Ctrl 1.5
Water Bucket
Silicon Wafer Ctrl 1.6




Step 1.7 Use the silicon wafer Ctrl 1.6 and a bag of boron in the Ion Beam to seed the 1st well with ions and obtain silicon wafer Ctrl 1.7.

Ion Implanter

Outputs Components Recipe Do you want to know more?
Fuel
Bag (Boron)
1
Silicon Wafer Ctrl 1.6
Silicon Wafer Ctrl 1.7
Water Bucket



Step 1.8 The implantation process disrupted the silicon crystal structure. To smooth and repair the silicon crystal, take the silicon wafer Ctrl 1.7 to the annealing furnace with an argon cartridge and obtain silicon wafer Ctrl 1.8.

Annealing Furnace

Outputs Components Recipe Do you want to know more?
Fuel
Cartridge (Argon)
1
Silicon Wafer Ctrl 1.7
Silicon Wafer Ctrl 1.8


Step 1.9 Use the silicon wafer Ctrl 1.8 and an oxygen cartridge in the O2 furnace to grow a SiO2 layer in the wafer and obtain silicon wafer Ctrl 1.9.

O2 Furnace

Outputs Components Recipe Do you want to know more?
Fuel
Cartridge (Oxygen)
1
Silicon Wafer Ctrl 1.8
Silicon Wafer Ctrl 1.9



Step 1.10 Use the silicon wafer Ctrl 1.9 in the [Scanning Electron Microscope|scanning electron microscope] to check if the 1st well was correctly created and obtain silicon wafer Ctrl 1.10.

Scanning Electron Microscope

Outputs Components Recipe Do you want to know more?
Fuel
Silicon Wafer Ctrl 1.9
Silicon Wafer Ctrl 1.10




Step 2.0 Get the Mask (Ctrl 2nd well) from the mask writer.

Mask Writer

Outputs Components Recipe Do you want to know more?
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Water Bucket
Mask (Ctrl 2nd well)



Step 2.1 Use the silicon wafer Ctrl 1.9 and a positive photoresist vial in the Chemical Solution Deposition machine to obtain the silicon wafer Ctrl 2.1.

Chemical Solution Deposition

Outputs Components Recipe Do you want to know more?
Fuel
Vial (Positive Photoresist)
Silicon Wafer Ctrl 1.9
Silicon Wafer Ctrl 2.1


Step 2.2 Use the silicon wafer Ctrl 2.1, Mask (Ctrl 2nd well) and a 365 nm UV Bulbs in the Contact Printer to imprint the etching pattern and obtain the silicon wafer Ctrl 2.3. For positive photoresist, the contact printer light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.

Contact Printer

Outputs Components Recipe Do you want to know more?
365 nm UV Bulbs
Mask (Ctrl 2nd well)
Vial (Positive Photoresist)
Silicon Wafer Ctrl 2.1
Silicon Wafer Ctrl 2.2
Fuel




Step 2.3 Use the silicon wafer Ctrl 2.2 and positive photoresist developer vial in the Chemical Processor to remove the unexposed photoresist and obtain silicon wafer Ctrl 2.3.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 2.2
Vial (Positive Photoresist Developer)
1
Silicon Wafer Ctrl 2.3
Water Bucket
Water Bucket
Fuel



Step 2.4 Use the silicon wafer Ctrl 2.3 and ammonium fluoride etchant vial in the Chemical Processor to etch the 2nd wells and obtain silicon wafer Ctrl 2.4.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 2.3
Vial (Ammonium Fluoride Etchant)
1
Silicon Wafer Ctrl 2.4
Water Bucket
Water Bucket
Fuel



Step 2.5 Use the silicon wafer Ctrl 2.4 and photoresist stripper SPM vial in the Chemical Processor to remove the exposed photoresist and obtain silicon wafer Ctrl 2.5.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 2.4
Vial (Photoresist Stripper SPM)
1
Silicon Wafer Ctrl 2.5
Water Bucket
Water Bucket
Fuel



Step 2.6 Use the silicon wafer Ctrl 2.5 in the wafer washer to clean the wafer of photoresist residues and obtain silicon wafer Ctrl 2.6.

Wafer Washer

Outputs Components Recipe Do you want to know more?
Fuel
Water Bucket
Silicon Wafer Ctrl 2.5
Water Bucket
Silicon Wafer Ctrl 2.6




Step 2.7 Use the silicon wafer Ctrl 2.6 and a bag of phosphorus in the Ion Bean to seed the 2nd well with ions and obtain silicon eafer Ctrl 2.7.

Ion Implanter

Outputs Components Recipe Do you want to know more?
Fuel
Bag (Phosphorus)
1
Silicon Wafer Ctrl 2.6
Silicon Wafer Ctrl 2.7
Water Bucket



Step 2.8 The implantation process disrupted the silicon crystal structure. To smooth and repair the silicon crystal, take the silicon wafer Ctrl 2.7 to the annealing furnace with an argon cartridge and obtain silicon wafer Ctrl 2.8.

Annealing Furnace

Outputs Components Recipe Do you want to know more?
Fuel
Cartridge (Argon)
1
Silicon Wafer Ctrl 2.7
Silicon Wafer Ctrl 2.8


Step 2.9 Use the silicon wafer Ctrl 2.8 and an oxygen cartridge in the O2 furnace to grow a SiO2 layer in the wafer and obtain silicon wafer Ctrl 2.9.

O2 Furnace

Outputs Components Recipe Do you want to know more?
Fuel
Cartridge (Oxygen)
1
Silicon Wafer Ctrl 2.8
Silicon Wafer Ctrl 2.9



Step 2.10 Use the silicon wafer Ctrl 2.9 in the scanning electron microscope to check if the 2st well was correctly created and obtain silicon wafer Ctrl 2.10.

Scanning Electron Microscope

Outputs Components Recipe Do you want to know more?
Fuel
Silicon Wafer Ctrl 2.9
Silicon Wafer Ctrl 2.10




Step 3.0 Get the Mask (Ctrl Metal) from the mask writer.

Mask Writer

Outputs Components Recipe Do you want to know more?
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Aluminum Nugget
Water Bucket
Mask (Ctrl Metal)



Step 3.1 Use the silicon wafer Ctrl 2.9, Mask (Ctrl Metal) and a positive photoresist vial in the chemical solution deposition machine to obtain the silicon wafer Ctrl 3.1.

Chemical Solution Deposition

Outputs Components Recipe Do you want to know more?
Fuel
Vial (Positive Photoresist)
Silicon Wafer Ctrl 2.9
Silicon Wafer Ctrl 3.1


Step 3.2 Use the silicon wafer Ctrl 3.1, Mask (Ctrl Metal), positive photoresist vial and a UV bulb in the Contact Printer to imprint the etching pattern and obtain the silicon wafer Ctrl 3.2. For positive photoresist, the contact printer light will harden and unexposed positive photoresist is soft and easily removable. The opposite occurs in negative photoresist.

Contact Printer

Outputs Components Recipe Do you want to know more?
365 nm UV Bulbs
Mask (Ctrl Metal)
Silicon Wafer Ctrl 3.1
Silicon Wafer Ctrl 3.2
Fuel



Step 3.3 Use the silicon wafer Ctrl 3.2 and positive photoresist developer vial in the chemical processor to remove the unexposed photoresist and obtain silicon wafer Ctrl 3.3.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 3.2
Vial (Positive Photoresist Developer)
1
Silicon Wafer Ctrl 3.3
Water Bucket
Water Bucket
Fuel



Step 3.4 Use the silicon wafer Ctrl 3.3 and ammonium fluoride etchant vial in the chemical processor to etch the metal contacts and obtain silicon wafer Ctrl 3.4.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 3.3
Vial (Ammonium Fluoride Etchant)
1
Silicon Wafer Ctrl 3.4
Water Bucket
Water Bucket
Fuel



Step 3.5 Use the silicon wafer Ctrl 3.4 and photoresist stripper SPM vial) in the chemical processor to remove the exposed photoresist and obtain silicon wafer Ctrl 3.5.

Chemical Processor

Outputs Components Recipe Do you want to know more?
Silicon Wafer Ctrl 3.4
Vial (Photoresist Stripper SPM)
1
Silicon Wafer Ctrl 3.5
Water Bucket
Water Bucket
Fuel


Step 3.6 Use the Silicon Wafer Ctrl 3.5 in the wafer washer to clean the wafer of photoresist residues and obtain silicon wafer Ctrl 3.6.

Wafer Washer

Outputs Components Recipe Do you want to know more?
Fuel
Water Bucket
Silicon Wafer Ctrl 3.5
Water Bucket
Silicon Wafer Ctrl 3.6


Step 3.7 Use the silicon wafer Ctrl 3.6 and a copper nugget for atomic layer deposition to create a copper layer in the wafer and obtain silicon wafer Ctrl 3.7.

Atomic Layer Deposition

Outputs Components Recipe Do you want to know more?
Fuel
Copper Nugget
1
Silicon Wafer Ctrl 3.6
Silicon Wafer Ctrl 3.7


Step 3.8 Use the silicon wafer Ctrl 3.7 in the chemical mechanical polisher to strip the excess of metal and obtain a unwashed controller die wafer.

Chemical Mechanical Polisher

Outputs Components Recipe Do you want to know more?
Fuel
Silicon Wafer Ctrl 3.7
Water Bucket
Water Bucket
Unwashed Controller Die Wafer


Step 3.9 Use the unwashed controller die wafer in the wafer washer to clean the wafer of photoresist residues and obtain the unchecked controller die wafer.

Wafer Washer

Outputs Components Recipe Do you want to know more?
Fuel
Water Bucket
Unwashed Controller Die Wafer
Water Bucket
Unchecked Controller Die Wafer


Step 3.10 Use the unchecked controller die wafer in the scanning electron microscope to check it for defects.

Scanning Electron Microscope

Outputs Components Recipe Do you want to know more?
Fuel
Unchecked Controller Die Wafer
Controller Die Wafer


Step 3.11 Use the controller die wafer in the stone cutter to obtain the controller die.

Stonecutter

Outputs Components Recipe Do you want to know more?
[Controller Die Wafer] Controller Die Wafer
Controller Die
16



Create the controller chip - Use a controller die, the enclosure and the interconnection array in the crafting table to obtain the controller chip.

Crafting Table

Outputs Components Recipe Do you want to know more?
Enclosure
Controller Die
Interconnection Array
Controller Chip


History

Semiconductor module 1.0


Gallery

Controller chip.png


Links to learn more

Introduction to chemical processes for micro- and nanofabrication course from Chris Mack at the University of Texas at Austin (Videos)

Semiconductor fabrication 101 online course from Purdue University (MOC)

Semiconductor manufacturing from Duane Boning at MIT (Course materials)

Fundamentals of semiconductor manufacturing and process control from Gary S. May and Costas J. Spanos (Book PDF)

Photolitography (Book PDF)

Handbook of Silicon Wafer Cleaning Technology (Third Edition) (Book PDF)

Silicon Wafer Cleaning (Paper PDF)



Certification

Semiconductor fabrication 101 online course from Purdue University (MOC)

SEMI University



References

Silicon (Wikipedia)

Semiconductor fabrication 101 online course from Purdue University (MOC)

The Amazing, Humble Silicon Wafer Video from Asianometry (Youtube video)

Retrieved from "https://polycraft.utdallas.edu/index.php?title=Controller_Chip&oldid=21305"